3D Finite Element Simulation of Graphene Nano-Electro-Mechanical Switches

Abstract

In this paper, we report the finite element method (FEM) simulation of double-clamped graphene nanoelectromechanical (NEM) switches. Pull-in and pull-out characteristics are analyzed for graphene NEM switches with different dimensions and these are consistent with the experimental results. This numerical model is used to study the scaling nature of the graphene NEM switches. We show the possibility of achieving a pull-in voltage as low as 2 V for a 1.5-μm-long and 3-nm-thick nanocrystalline graphene beam NEM switch. In order to study the mechanical reliability of the graphene NEM switches, von Mises stress analysis is carried out. This analysis shows that a thinner graphene beam results in a lower von Mises stress. Moreover, a strong electrostatic force at the beam edges leads to a mechanical deflection at the edges larger than that around the center of the beam, which is consistent with the von Mises stress analysis.

Stacking of nanocrystalline graphene for nano-electro-mechanical (NEM) actuator applications

“…Graphene is an ideal material for alternative switching devices such as tunneling field effect transistors (Hammam et al 2017;Hamam et al 2018). Graphene based NEM (GNEM) contact switches show low off-state leakage current, steep switching slope, and high on/off ratio (Milaninia et al 2009;Sun et al 2014Sun et al , 2016aKulothungan et al 2016). In spite of these inherent advantages, the GNEM contact switches are reported with high pull-in voltage (>1.5 V) and low switching reliability (Wagner and Vella 2013;Yaung et al 2014;Sun et al 2014;Jothiramalingam et al 2017;Wang et al 2017).…”

Twist angle-dependent work functions in CVD-grown twisted bilayer graphene probed by Kelvin probe force microscopy

“…It appears that the thermal stability of tBLG depends on the grain size. 59,60 ABA-TLG (Bernal-stacked), ABC-TLG (rhombohedralstacked), and tTLG were also resolved in the KPFM and Raman measurements. In the future, KPFM investigations of tTLG and the emergent exotic quantum states within the semi-metallic ABA-TLG and semiconducting ABC-TLG can be considered.…”

Large Scale Fabrication of Graphene Based Nano‐Electromechanical (NEM) Contact Switches with Sub‐0.5 Volt Actuation

“…For graphene the mechanical properties such as density of 2.2 g cm −3 , Young's modulus of 1 TPa, and Poisson's ratio of 0.17 were used. [ 55 ] In this FEM model, the out of plane mechanical properties of the graphene beam is considered only within the limits of linear elastic theory. [ 29 ] First, the pull‐in was confirmed by beam displacement.…”