3D integrated photonics platform with deterministic geometry control

Michon, Jérôme; Geiger, Sarah; Li, Lan; Goncalves, Claudia; Lin, Hongtao; Richardson, Kathleen; Jia, Xinqiao; Hu, Juejun

doi:10.1364/prj.375584

Cited by 12 publications

(8 citation statements)

References 56 publications

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“…Similar principles were recently applied to fabricate the first 3D integrated photonic device . The fabrication process, illustrated in Figure d, also involves a 2D structure deformed into the desired 3D geometry.…”

Section: Missing Pieces: Enabling Technologiesmentioning

confidence: 90%

“…The strain–optical coupling effect can also be leveraged in the other direction for strain or deformation sensing. − Compared with electrical strain gauges and fiber Bragg grating (FBG) sensors, flexible photonic sensors claim unique advantages such as high sensitivity, a fast and highly reversible response, immunity to electromagnetic interference, minimal temperature sensitivity with proper thermal compensation, multidirectional strain sensing capability, and a large capacity for multiplexing.…”

Section: Applicationsmentioning

confidence: 99%

“…In optogenetics, the large volume (compared with rat models) and enormous complexity of human brains mandate light delivery solutions with low propagation losses to access different parts of brain and large optical channel counts to interface with a large number of neurons. Flexible integrated photonics thus has the potential to fulfill these needs …”

Section: Missing Pieces: Enabling Technologiesmentioning

confidence: 99%

Section: Missing Pieces: Enabling Technologiesmentioning

confidence: 99%

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Flexible and Stretchable Photonics: The Next Stretch of Opportunities

et al. 2020

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Conventional electronic and photonic devices are inherently 2D and rigid because of the substrates on which they are fabricated. However, the world is not flat and stiff: There are many applications that would benefit from soft devices and nonplanar geometries, such as interfacing with the soft, curvilinear, and dynamic surfaces of living organisms. This mismatch demands flexible and stretchable devices that can be mechanically deformed (bent, folded, twisted, stretched, or compressed) without damage to their useful properties. Here we furnish an overview of state-ofthe-art material, design, processing, and device technologies underlying the rapidly evolving area of flexible and stretchable photonics. We further offer our perspective on the key enabling technologies that will define new growth opportunities in this field as emerging applications of flexible and stretchable photonics continue to unfold.

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Section: Missing Pieces: Enabling Technologiesmentioning

confidence: 90%

Section: Applicationsmentioning

confidence: 99%

Section: Missing Pieces: Enabling Technologiesmentioning

confidence: 99%

Section: Missing Pieces: Enabling Technologiesmentioning

confidence: 99%

See 2 more Smart Citations

Flexible and Stretchable Photonics: The Next Stretch of Opportunities

et al. 2020

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“…The optical waveguide made from new materials such as ChG possesses obvious advantages for fabrication. [47,228,229] Second, the photonic-crystal waveguide is a typically used structure for improving the performance of the EA modulator because of the slow light effect. Integrating graphene with the Si photonic-crystal waveguide, high-performance EA modulators can be obtained (Figure 10c).…”

Section: Ea Modulatormentioning

confidence: 99%

Two‐Dimensional Materials for Integrated Photonics: Recent Advances and Future Challenges

Yin

et al. 2021

Small Science

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With the development of novel optoelectronic materials and nanofabrication technologies, integrated photonics is a rapidly developing field that will promote the development and application of next‐generation photonic devices. In recent years, emerging two‐dimensional materials (2DMs) including graphene, transition metal dichalcogenides (TMDCs), black phosphorus (BP), and ternary compounds show many complementarities and unique characteristics over those of traditional optoelectronic materials including broadband absorption, ultrafast carrier mobility, strong nonlinear effects, and compatibility for monolithic integration. Herein, the recent progress on waveguide‐integrated active devices for a full photonic circuit based on 2DMs is reviewed. Both the development of nanofabrication techniques and the working mechanism of active photonic components based on 2DMs containing integrated light sources, waveguide‐integrated modulators, photodetectors, as well as some advanced 2DMs‐based optoelectronic devices are illustrated in detail. In the end, the existing challenges and perspectives on novel 2DMs‐integrated photonics are summarized and discussed.

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A Universal Approach to High‐Index‐Contrast Flexible Integrated Photonics

Chen

Shi

Wei

et al. 2023

Advanced Optical Materials

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stimulation probes, [4][5][6][7] optical communication, [8][9][10][11][12] etc.Polymers have been commonly used to fabricate flexible photonic devices due to their natural flexibility and low-temperature film deposition. [13][14][15] However, a low-refractive-index contrast between the polymer core structures and cladding substrates cannot allow strong optical confinement, which often leads to the large size of the fabricated devices and is not conducive to high-density integration. In comparison with polymers, silicon-based materials, [16] inorganic oxides, [17,18] and chalcogenide glass [19] materials show high refractive index and low absorption loss, enabling a large degree of freedom in obtaining functional optical structures for strong optical confinement on flexible substrates. [20][21][22][23] It is innately advantageous to realize compact, flexible photonic devices using an inorganic-organic hybrid structure consisting of inorganic core material and organic cladding substrate. [24] Nowadays, the manufacturing processes of high-index-contrast (HIC) flexible integrated photonic devices are based on pattern transfer [25][26][27] and monolithic integration. [16,28] Among the many materials used for flexible photonics, silicon-based flexible devices were prepared by transferring nanostructures from a rigid carrier wafer to the flexible substrate via under-cut etching of the sacrificial oxide layer. [26,27] Hydrofluoric acid (HF) is often used during this process, which etches optical films like silicon nitride (SiN), resulting in device degradation. [26] Flexible integrated photonics is an essential technology for emerging applications, including flexible optical interconnects, optogenetic stimulation, and implantable conformal sensing. Here, a novel and universal route for fabricating flexible photonic components with high-refractive-index contrast is reported. Central to such a unique method is the utilization of germanium oxide (GeO) as the sacrificial layer for releasing nanostructures from rigid substrates to flexible substrates. Various high-quality inorganic optical materials can be grown directly on GeO by different thin-film deposition methods due to its resistance to both high temperature and high-power oxygen plasmas. In addition to the absence of restrictions on the material choices and integration processes for flexible photonic structures, the approach uses water as the etchant to remove the sacrificial layer, which has minimal impact on the optical performance of the photonic structures. Using this approach, a strain-insensitive/sensitive microring resonator based on plasma-enhanced chemical vapor deposited silicon nitride and reactive sputtered titanium oxide, respectively, is demonstrated, establishing the strategy as a facile and universal route for the fabrication of high-index-contrast flexible integrated photonic devices with various functionalities.

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3D integrated photonics platform with deterministic geometry control

Cited by 12 publications

References 56 publications

Flexible and Stretchable Photonics: The Next Stretch of Opportunities

Flexible and Stretchable Photonics: The Next Stretch of Opportunities

Two‐Dimensional Materials for Integrated Photonics: Recent Advances and Future Challenges

A Universal Approach to High‐Index‐Contrast Flexible Integrated Photonics

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