3D Layout of Interdigital Transducers for High Frequency Surface Acoustic Wave Devices

Shen, Junyao; Luo, Jingting; Fu, Sulei; Su, Rongxuan; Wang, Weibiao; Zeng, Fei; Song, Cheng; Pan, Feng

doi:10.1109/access.2020.3007162

Cited by 20 publications

(9 citation statements)

References 47 publications

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“…Devices with the λ of 1 µm or even shorter can be fabricated in reality according to the devices in the former research such as [12]. Even when the lithography reaches its limit, the new solution we proposed in our former work [36] can further shorten the λ under the same critical resolution of lithography. Therefore, in accordance with the former research and the results in this work, the frequency higher than 10 GHz can be achieved by the devices based on the structures in this paper.…”

Section: Discussionmentioning

confidence: 94%

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Systematical Study of the Basic Properties of Surface Acoustic Wave Devices Based on ZnO and GaN Multilayers

Shen

et al. 2020

Electronics

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Recently, surface acoustic wave (SAW) devices based on layered structures are a popular area of research. Multilayered structures, including ZnO and GaN, have shown great performance and can be applied in diverse fields. Meanwhile, thin films, such as AlGaN and n-ZnO, can be added to these structures to form a 2-D electron gas (2DEG) which makes the devices tunable. This work systematically studies the basic properties of SAW devices based on ZnO and GaN multilayers via COMSOL Multiphysics. The sorts of structures with different crystal orientations are simulated, and various acoustic modes are considered. Results show that a range of phase velocity from about 2700 m/s to 6500 m/s can be achieved, and devices based on ZnO and GaN multilayers can meet the requirements of the electromechanical coupling coefficient from about 0 to 7%. Every structure’s unique properties are valuable for diverse applications. For example, c-ZnO/c-GaN/c-sapphire structure can be used for high-frequency and large-bandwidth SAW devices, while SAW devices based on a-ZnO/a-GaN/r-sapphire and 2DEG are suitable for programmable SAW sensors. This work has great reference value for future research into SAW devices.

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Section: Discussionmentioning

confidence: 94%

“…where f r is the resonance frequency and f a is the anti-resonance frequency [35,36]. Al is chosen as the material of electrodes in this work and the thicknesses of the electrodes are all 0.08λ.…”

Section: Methodsmentioning

confidence: 99%

Systematical Study of the Basic Properties of Surface Acoustic Wave Devices Based on ZnO and GaN Multilayers

Shen

et al. 2020

Electronics

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“…[15][16][17] SAW-based devices, which utilize interdigital transducers (IDT) to generate ultrasonic waves in piezoelectric crystals, find wide application in electronic equipment. [18][19][20] Obtaining precise dispersion curves across a broad frequency range is vital for determining film parameters using SAW technique. Wider frequency domains in SAW dispersion curves provide more information, enabling the simultaneous measurement of multiple film parameters.…”

Section: Introductionmentioning

confidence: 99%

Simultaneous Determination of Young's Modulus and Density of Ultrathin Low‐k Films Using Surface Acoustic Waves

Zhang,

Xiao,

Zhang

et al. 2024

Physica Status Solidi (a)

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The nondestructive testing (NDT) of mechanical properties in ultrathin low dielectric constant (low‐k) films is a major challenge in integrated circuit manufacturing. Young's modulus and density are closely related parameters for low‐k films. This study presents a method for NDT of Young's modulus and density of porous low‐k black diamond (SiOC:H, BD) films. A linear frequency modulation (LFM) surface acoustic wave (SAW) interdigital transducer (IDT) with a frequency range of 20–250 MHz is designed to generate SAW signals on the samples. The series of SAW waveforms obtained on the samples are processed to obtain experimental SAW dispersion curves across a broad frequency range. By comparing these experimental curves with theoretical dispersion curves, as well as their first‐order derivatives, Young's modulus and density of porous low‐k BD films with thicknesses of 100, 300, 500, and 1000 nm are characterized. To verify Young's modulus measurements from the SAW method, a control experiment using nanoindentation is conducted. The results demonstrate that the SAW method can reduce the impact of the substrate and is independent of the film thickness. This study presents a highly accurate measuring method for simultaneous multiparameter evaluation of ultra‐thin low‐k films.

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“…Generally, in telecommunication applications, the operating frequencies of SAW devices are particularly high and can even reach several gigahertz. [ 18 ] For NDT applications, it has been proven that the propagation characteristics of SAW are still sensitive to the thickness of the film, even when the wavelength of the SAW is on the order of micrometers. [ 19,20 ] As a result, the surface acoustic wave‐interdigital transducer (SAW‐IDT) has significant advantages in terms of manufacturing cost and characterization accuracy.…”

Section: Introductionmentioning

confidence: 99%

Nondestructive Determination of Young's Modulus of Interconnecting Thin Films by a Broadband Surface Acoustic Wave‐Interdigital Transducer

Zhang

Xiao

et al. 2023

Physica Rapid Research Ltrs

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A facile and rapid method for nondestructive testing (NDT) of the Young's modulus of interconnecting thin films using a broadband surface acoustic wave‐interdigital transducer (SAW‐IDT) is presented herein. A linear periodic SAW‐IDT with 20–125 MHz is designed and fabricated to excite surface acoustic wave (SAW) signals on the samples. By applying burst excitations under different frequencies, the SAW waveforms are picked up by a miniaturized piezoelectric transducer and processed by slant stack transformation. Consequently, the SAW dispersion curves over a wide frequency band are established to match the film parameters. Young's modulus of the 100 and 300 nm thickness of SiO2 films and the 800 and 1500 nm low‐k polyimide (PI) films is characterized. The nanoindentation method, as a control experiment, is also carried out to verify the accuracy of the SAW method, and the test results show that the SAW method can eliminate the effect of the substrate with higher precision. This work shows the advantage of the NDT technique by SAW‐IDT in measuring the Young's modulus of ultrathin films with low cost, controllable frequency range, and high accuracy.

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3D Layout of Interdigital Transducers for High Frequency Surface Acoustic Wave Devices

Cited by 20 publications

References 47 publications

Systematical Study of the Basic Properties of Surface Acoustic Wave Devices Based on ZnO and GaN Multilayers

Systematical Study of the Basic Properties of Surface Acoustic Wave Devices Based on ZnO and GaN Multilayers

Simultaneous Determination of Young's Modulus and Density of Ultrathin Low‐k Films Using Surface Acoustic Waves

Nondestructive Determination of Young's Modulus of Interconnecting Thin Films by a Broadband Surface Acoustic Wave‐Interdigital Transducer

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