“…High-energy beams (from a few MeV to a few hundred of MeV) are used for ion beam analysis (IBA) to investigate, in a nondestructive fashion, the elemental composition and the electronic properties of materials, in the μmand sub-μm scale (Tsuji et al, 2008(Tsuji et al, , 2012Avasthi and Mehta, 2011). Owing to the charged nature of ions, the use of electromagnetic optics is possible to obtain focused ion beams which are typically of a micrometric size, but can reach the 10 nm scale (Orloff, Swanson, and Utlaut, 1996;Sakai et al, 2002;van Kan et al, 2005;Karydas et al, 2007;Tsuji et al, 2008Tsuji et al, , 2012Siegele et al, 2009;Rothermel et al, 2010;Fujita, Ishii, and Ogawa, 2011;Gordillo et al, 2011;Kamiya et al, 2011;Rout et al, 2013;Kada et al, 2014;Sorieul et al, 2014). The actual spatial resolution depends on the lateral straggling of the ion beam in the sample, which depends on the ion mass and energy as well as on the sample nature.…”