3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity

Lewis, Brett B.; Winkler, Robert; Sang, Xiahan; Pudasaini, Pushpa Raj; Stanford, Michael G.; Plank, Harald; Unocic, Raymond R.; Fowlkes, Jason D.; Rack, Philip D.

doi:10.3762/bjnano.8.83

Cited by 27 publications

(30 citation statements)

References 77 publications

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“…In recent years, different approaches have been demonstrated, including gas-/laser-/temperature-assisted approaches during [72,[83][84][85][86][87][88] or after deposition [44,[89][90][91]. Although different in execution, the common element for most of these approaches is the tendency for morphological disruption during carbon removal, which becomes even more challenging for freestanding 3D nano-architectures [44,84]. This aspect is discussed in the "Challenges" section below.…”

Section: Materials and Functionalitiesmentioning

confidence: 99%

“…While the situation is currently approached by different strategies, the ideal case would be precursor materials, which provide contamination-free deposits right after growth, as demonstrated for Co3Fe [23,[113][114][115]. An alternative strategy is to purify the material along with deposition, which was partly successful by simultaneous injection of water vapor [83] or laser pulse cycles [84]. The drawbacks, however, are a higher partial pressure, which has not yet been demonstrated to be compatible with 3D-FEBID, or the high local temperatures in the case of laser pulses, In summary, this section reviewed the most important SPM modes, which benefit from FEBID SPM tip editing, which includes small feature sizes, chemical purity, and morphological tuning.…”

Section: Challengesmentioning

confidence: 99%

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Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Plank

Winkler

Schwalb³

et al. 2019

Micromachines

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Scanning probe microscopy (SPM) has become an essential surface characterization technique in research and development. By concept, SPM performance crucially depends on the quality of the nano-probe element, in particular, the apex radius. Now, with the development of advanced SPM modes beyond morphology mapping, new challenges have emerged regarding the design, morphology, function, and reliability of nano-probes. To tackle these challenges, versatile fabrication methods for precise nano-fabrication are needed. Aside from well-established technologies for SPM nano-probe fabrication, focused electron beam-induced deposition (FEBID) has become increasingly relevant in recent years, with the demonstration of controlled 3D nanoscale deposition and tailored deposit chemistry. Moreover, FEBID is compatible with practically any given surface morphology. In this review article, we introduce the technology, with a focus on the most relevant demands (shapes, feature size, materials and functionalities, substrate demands, and scalability), discuss the opportunities and challenges, and rationalize how those can be useful for advanced SPM applications. As will be shown, FEBID is an ideal tool for fabrication/modification and rapid prototyping of SPM-tipswith the potential to scale up industrially relevant manufacturing.

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Section: Materials and Functionalitiesmentioning

confidence: 99%

Section: Challengesmentioning

confidence: 99%

Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Plank

Winkler

Schwalb³

et al. 2019

Micromachines

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“…Using this approach, Stanford et al [ 24 ] reported that LAEBID augmented by reactive gases (O 2 ) decreased the C content by 75% in nanostructures created from MeCpPtMe 3 . In related work, Lewis et al [ 25 ] found that purification by LAEBID resulted not only in higher platinum content but also in an improved platinum coalescence and a transition from amorphous to graphitic carbon. The net effect of these chemical and structural transformations was a 100-fold improvement in nanowire resistivity, while maintaining a high degree of nanostructure resolution.…”

Section: Introductionmentioning

confidence: 99%

Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition

Spencer

Barclay

Gallagher

et al. 2017

Beilstein J. Nanotechnol.

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The ability of electrons and atomic hydrogen (AH) to remove residual chlorine from PtCl2 deposits created from cis-Pt(CO)2Cl2 by focused electron beam induced deposition (FEBID) is evaluated. Auger electron spectroscopy (AES) and energy-dispersive X-ray spectroscopy (EDS) measurements as well as thermodynamics calculations support the idea that electrons can remove chlorine from PtCl2 structures via an electron-stimulated desorption (ESD) process. It was found that the effectiveness of electrons to purify deposits greater than a few nanometers in height is compromised by the limited escape depth of the chloride ions generated in the purification step. In contrast, chlorine atoms can be efficiently and completely removed from PtCl2 deposits using AH, regardless of the thickness of the deposit. Although AH was found to be extremely effective at chemically purifying PtCl2 deposits, its viability as a FEBID purification strategy is compromised by the mobility of transient Pt–H species formed during the purification process. Scanning electron microscopy data show that this results in the formation of porous structures and can even cause the deposit to lose structural integrity. However, this phenomenon suggests that the use of AH may be a useful strategy to create high surface area Pt catalysts and may reverse the effects of sintering. In marked contrast to the effect observed with AH, densification of the structure was observed during the postdeposition purification of PtCx deposits created from MeCpPtMe3 using atomic oxygen (AO), although the limited penetration depth of AO restricts its effectiveness as a purification strategy to relatively small nanostructures.

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“…Ni-containing deposit can be prepared as well, but so far the quality and composition is poorer compared to Fe and Co deposits, as pointed out in a review on FEBID-grown magnetic nanostructures by De . One can also prepare a non-magnetic metallic deposit such as Ag (Höflich et al 2017), Au, Cu (Esfandiarpour et al 2017), Pt (Lewis et al 2017). These can serve either as a protection, electrical contacts, or for injection of spin current through the spin-Hall effect in case of Pt.…”

Section: Focused Electron Beam Induced Depositionmentioning

confidence: 99%

Magnetic Nanowires and Nanotubes

Staňo

Fruchart

2018

Handbook of Magnetic Materials

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We propose a review of the current knowledge about the synthesis, magnetic properties and applications of magnetic cylindrical nanowires and nanotubes. By nano we consider diameters reasonably smaller than a micrometer. At this scale, comparable to micromagnetic and transport length scales, novel properties appear. At the same time, this makes the underlying physics easier to understand due to the limiter number of degrees of freedom involved. The three-dimensional nature and the curvature of these objects contribute also to their specific properties, compared to patterns flat elements. While the topic of nanowires and later nanotubes started now decades ago, it is nevertheless flourishing, thanks to the progress of synthesis, theory and characterization tools. These give access to ever more complex and thus functional structures, and also shifting the focus from material-type measurements of large assemblies, to single-object investigations. We first provide an overview of common fabrication methods yielding nanowires, nanotubes and structures engineered in geometry (change in diameter, shape) or material (segments, core-shell structures), shape or core-shell. We then review their magnetic properties: global measurements, magnetization states and switching, single domain wall statics and dynamics, and spin waves. For each aspect, both theory and experiments are surveyed. We also mention standard characterization techniques useful for these. We finally mention emerging applications of magnetic nanowires and nanotubes, along with the foreseen perspectives in the topic.

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3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity

Cited by 27 publications

References 77 publications

Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Focused Electron Beam-Based 3D Nanoprinting for Scanning Probe Microscopy: A Review

Comparing postdeposition reactions of electrons and radicals with Pt nanostructures created by focused electron beam induced deposition

Magnetic Nanowires and Nanotubes

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