3D optical measuring technologies for industrial applications

Chugui, Yuri V.; Verkhogliad, Alexander G.; Kalikin, Vadim E.; Zavyalov, P. S.

doi:10.1117/12.895003

Cited by 4 publications

(3 citation statements)

References 10 publications

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“…7). The 3D-relief of steps with the profile height of one interatomic distance has been reconstructed [7].…”

Section: D Superresolution Optical Micro-/nanoprofilometrymentioning

confidence: 99%

3D Optical Measuring and Laser Technologies for Science and Industry

Chugui

2017

AMM

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Modern industry and science take novel 3D optical measuring systems and laser technologies with high resolution. For solving their actual problems we have developed the family of the optical measuring systems and technologies. Peculiarities of 3D image formation under partially coherent illumination using constructive calculation method are given. The optical methods and system for 3D dimensional inspection of ceramic parts are presented. The performances of 3D super resolution optical low-coherent micro-/nanoprofilometer are given. Using atomic perfectly-smooth mirror as a reference object, the breakthrough in-depth measurement with 20 picometers was achieved. The newest results in the field of laser technologies for high-precision synthesis of microstructures by updated image generator using the semiconductor laser are presented. The measuring systems and the laser image generator have been tested by the customers and are used in different branches of industry and science.

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“…7). The 3D-relief of steps with the profile height of one interatomic distance has been reconstructed [7].…”

Section: D Superresolution Optical Micro-/nanoprofilometrymentioning

confidence: 99%

3D Optical Measuring and Laser Technologies for Science and Industry

Chugui

2017

AMM

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“…Mechanical measuring systems can be prone to significant errors and deformities due to rapid wear. [1][2][3][4] Linear encoders with optical grating scales are the most common optoelectronic measuring devices used for high-precision applications. Simple optical encoder systems are based on the geometrical effect of phase-shifted optical relays for the conversion of the grating displacement relative to the read head into an electrical signal.…”

Section: Laser Measurement Systemsmentioning

confidence: 99%

A fast high-precision six-degree-of-freedom relative position sensor

Hughes¹,

Macasaet

Griswold

et al. 2016

SPIE Proceedings

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Lasers are commonly used in high-precision measurement and profiling systems. Some laser measurement systems are based on interferometry principles, and others are based on active triangulation, depending on requirements of the application. This paper describes an active triangulation laser measurement system for a specific application wherein the relative position of two fixed, rigid mechanical components is to be measured dynamically with high precision in six degrees of freedom (DOF). Potential applications include optical systems with feedback to control for mechanical vibration, such as target acquisition devices with multiple focal planes. The method uses an array of several laser emitters mounted on one component. The lasers are directed at a reflective surface on the second component. The reflective surface consists of a piecewise-planar pattern such as a pyramid, or more generally a curved reflective surface such as a hyperbolic paraboloid. The reflected spots are sensed at 2dimensional photodiode arrays on the emitter component. Changes in the relative position of the emitter component and reflective surface will shift the location of the reflected spots within photodiode arrays. Relative motion in any degree of freedom produces independent shifts in the reflected spot locations, allowing full six-DOF relative position determination between the two component positions. Response time of the sensor is limited by the read-out rate of the photodiode arrays. Algorithms are given for position determination with limits on uncertainty and sensitivity, based on laser and spot-sensor characteristics, and assuming regular surfaces. Additional uncertainty analysis is achievable for surface irregularities based on calibration data.

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“…From this motivation, we have started to develop inner profile measurements using a ring beam device in 2006 2 . The inner profile measurement has been attracted great interests to evaluate the commercial products in the fields of industry such as automobiles, air planes, heavy industries, energy plants, civil engineering and constructions, and medicine [3][4][5][6][7] . As advanced our research works, there are requirements concerning the center alignment from several different fields of the industry 2,7 .…”

Section: Introductionmentioning

confidence: 99%

Optical center alignment technique based on inner profile measurement method

Wakayama

Yoshizawa²

2014

SPIE Proceedings

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Center alignment is important technique to tune up the spindle of various precision machines in manufacturing industry. Conventionally such a tool as a dial indicator has been used to adjust and to position the axis by manual operations of a technical worker. However, it is not easy to precisely control its axis. In this paper, we developed the optical center alignment technique based on inner profile measurement using a ring beam device. In this case, the center position of the cylinder hole can be determined from circular profile detected by optical sectioning method using a ring beam device. In our trials, the resolution of the center position is proved less than 10 micrometers in extreme cases. This technique is available for practical applications in machine tool industry.

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3D optical measuring technologies for industrial applications

Cited by 4 publications

References 10 publications

3D Optical Measuring and Laser Technologies for Science and Industry

3D Optical Measuring and Laser Technologies for Science and Industry

A fast high-precision six-degree-of-freedom relative position sensor

Optical center alignment technique based on inner profile measurement method

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