2014
DOI: 10.1039/c4ra04934a
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3D periodic composite nanopatterns with superior mechanical properties: the effect of nanoparticles on pattern contrast and mechanical properties

Abstract: Three-dimensional (3D) periodic nanopatterns have gained much interest due to their potential applications, ranging from photonics to biological tissue engineering. Here, 3D silica nanoparticle/SU8 composite patterns were fabricated by holographic lithography. Although a uniform composite photoresist film was obtained by mixing epoxy-functionalized silica nanoparticles, the unavoidable scattering by the silica nanoparticles sufficiently changed the photosensitivity of the photoresists, resulting in the decreas… Show more

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