3D simulation of AFM non-uniform piezoelectric micro-cantilever with various geometries subjected to the tip-sample forces

Korayem, Moharam Habibnejad; Abdi, Moein

doi:10.1051/epjap/2017160416

Cited by 4 publications

(2 citation statements)

References 25 publications

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“…The vibration response in liquid via AFM is investigated in detail by Korayem and Nahavindi [28] as well as Korayem et al [29]. Moreover, the impact of surfaces type and roughness on vibration of piezoelectric miniature structures with considering the effect of asperities (like Katainen or Kumar model) was analyzed based on MCST by Korayem and Korayem [30][31][32], Korayem and Abdi [33] as well as Korayem et al [34]. In general, the recent studies' results demonstrate that size-dependent, surface energy and dispersion forces made essential contributions to the system stability and ignoring them causes incorrect results.…”

Section: Introductionmentioning

confidence: 99%

Thermal, size and surface effects on the nonlinear pull-in of small-scale piezoelectric actuators

SoltanRezaee

Ghazavi

2017

Smart Mater. Struct.

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Electrostatically actuated miniature wires/tubes have many operational applications in the high-tech industries. In this research, the nonlinear pull-in instability of piezoelectric thermal small-scale switches subjected to Coulomb and dissipative forces is analyzed using strain gradient and modified couple stress theories. The discretized governing equation is solved numerically by means of the step-by-step linearization method. The correctness of the formulated model and solution procedure is validated through comparison with experimental and several theoretical results. Herein, the length-scale, surface energy, van der Waals attraction and nonlinear curvature are considered in the present comprehensive model and the thermo-electro-mechanical behavior of cantilever piezo-beams are discussed in detail. It is found that the piezoelectric actuation can be used as a design parameter to control the pull-in phenomenon. The obtained results are applicable in stability analysis, practical design and control of actuated miniature intelligent devices.

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Section: Introductionmentioning

confidence: 99%

Thermal, size and surface effects on the nonlinear pull-in of small-scale piezoelectric actuators

SoltanRezaee

Ghazavi

2017

Smart Mater. Struct.

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“…Linear and angular inertia stiffness matrix, piezoelectric stiffness matrix, shear stiffness matrix and stiffness of couple stress matrix are obtained from Eqs. (30) to (33):…”

Section: Modeling Of the Oblique Four-layered Micro-cantilever With The Axial Load By Using Couple Stress Theorymentioning

confidence: 99%

Investigation of the axial load effect on the vibration and topography of the AFM oblique four-layered piezoelectric micro-cantilever

Korayem¹,

Hafezi²,

Abdi³

2019

J Braz. Soc. Mech. Sci. Eng.

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In this paper, the vibration behavior of atomic force microscopy (AFM) micro-cantilever (MC) with a piezoelectric layer in the non-contact mode considering the axial load in the air medium was studied. In the dynamic modes of AFM nano-robot, parameters such as amplitude, frequency and motion phase are used as feedback factors in the control system in order to extract sample surface information and the nanoparticle voltage. Consequently, to extract these parameters, the vibration analysis of the MCs of this nano-robot is essential. Additionally, because of the wide-spread applications of oblique MCs, applying the axial and transverse forces into the model is absolutely necessary. In order to simulate the AFM four-layered piezoelectric MC with the axial displacement, Timoshenko beam theory as well as modified couple stress theory has been used. Considering the axial displacement in the modeling not only leads to more degrees of freedom, but also has increased the amount of calculations. To extract the equations of the system, energy method has been used, and then, the FEM was applied to discrete the equations. To verify the accuracy of the results, the frequency and time responses of FEM have been compared with the results of the 3D mode simulation obtained by COMSOL software and experimental results. The comparison of results indicates that modifying the modeling by considering the axial displacement has increased the accuracy of the frequency and time responses. The error percentage of the first frequency response is 0.42% and the error percentage of the time response is 0.0053%. Furthermore, to examine the effect of MC geometry on its vibrational behavior, frequency and time responses of three common geometries of AFM MCs have been extracted. The results illustrate the improvement of modeling in all three geometries. Then, the sample surface topography of MCs at the first and second excitation frequencies in contact with rectangular roughnesses demonstrated the decline of time delay at the second excitation frequency. The results of the topography simulation in the air environment show that the roughness's trend is better at the second mode than at the first mode. Finally, the effect of MC angle on the topography of the rectangular MC surfaces in contact with the rectangular roughness in 2D and 3D modes was examined in the presence and the absence of axial load. The results show that in the presence of the axial displacement in modeling, by increasing of MC angle, the topography quality increases drastically.

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Experimental analysis of rough surface topography and modifying the humidity effect in AFM images to improve the topography quality

Korayem

Taghizadeh

Abdi

2017

Int J Adv Manuf Technol

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3D simulation of AFM non-uniform piezoelectric micro-cantilever with various geometries subjected to the tip-sample forces

Cited by 4 publications

References 25 publications

Thermal, size and surface effects on the nonlinear pull-in of small-scale piezoelectric actuators

Thermal, size and surface effects on the nonlinear pull-in of small-scale piezoelectric actuators

Investigation of the axial load effect on the vibration and topography of the AFM oblique four-layered piezoelectric micro-cantilever

Experimental analysis of rough surface topography and modifying the humidity effect in AFM images to improve the topography quality

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