3D-soule: A fabrication process for large scale integration and micromachining of spherical structures

Visvanathan, Karthik; Li, Tao; Gianchandani, Yogesh B.

doi:10.1109/memsys.2011.5734358

Cited by 19 publications

(10 citation statements)

References 10 publications

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“…For instance, hemispherical shells fabricated by deposition of polysilicon [3] or silicon nitride [4] thin films into isotropically etched cavities have recently been demonstrated. Alternative fabrication techniques include "3-D SOULE" process for fabrication of mushroom and concave shaped spherical structures [5], as well as blow molding of bulk metallic glasses into pre-etched cavities [6]. MEMS wineglass resonators with atomic smoothness and low thermoelastic dissipation (TED) have not yet been demonstrated in the literature.…”

Section: Introductionmentioning

confidence: 99%

High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG

Senkal

Ahamed

Trusov

et al. 2013

Sensors and Actuators A: Physical

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We report, for the first time, a MEMS fabrication process for building atomically smooth, symmetric 3-D wineglass and spherical shell structures, using low internal loss materials, namely fused quartz and ultra low expansion titania silicate glass (ULE TSG). The approach consists of three major steps: (1) a deep fused quartz cavity etch, (2) plasma activated bonding of fused quartz to fused quartz or TSG and (3) a high temperature (up to 1700 • C) micro-glassblowing process. An in-house process capability of 1800 • C glassblowing with a rapid cooling rate of 500 • C/min was developed. Feasibility of the process has been demonstrated by fabrication of fused quartz and TSG micro-glassblown structures. Spherical and inverted-wineglass shells with self-aligned stem structures were fabricated using this process. The approach may enable new classes of TSG and fused quartz MEMS devices with extremely low surface roughness (0.23 nm surface average), intrinsically low thermoelastic dissipation (QTED > 5E+10), and highly symmetric structures (radial error < 500 ppm).

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Section: Introductionmentioning

confidence: 99%

High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG

Senkal

Ahamed

Trusov

et al. 2013

Sensors and Actuators A: Physical

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“…We fabricated quasi-spherical structures using micro glass-blowing techniques [10], demonstrating low order resonant frequencies about 1MHz [11] for resonators with improved thermal stability [12]. In [9], a new fabrication process is introduced combining batch-mode micro ultrasonic machining (μUSM), lapping, and micro electro-discharge machining (μEDM) for creating FS spherical structures with operation frequencies on the order of MHz and Q factors in air of 350. 978-1-4799-5915-0/15/$31.00 ©2015 IEEE Electrostatic actuation and sensing of spherical resonators present a challenge.…”

Section: Introductionmentioning

confidence: 99%

The concept of "collapsed electrodes" for glassblown spherical resonators demonstrating 200:1 aspect ratio gap definition

Giner

Shkel

2015

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings

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We report a technique for defining high aspect ratio electrostatic gaps in micromachined glassblown spherical resonators. The approach is based on intentionally allowing a physical contact between the resonator and electrode structure, hence "collapsed electrodes", then releasing and metalizing the electrodes and resonator. We utilized 500 um SOI electrodes in the glassblowing fabrication process, allowing to define narrow (2 um) and thick (400 um) electrostatic actuators (200:1 aspect ratio). We demonstrated a spherical resonator integrated with electrodes, blurring the boundary in complexity of fabricating conventional (2D) and glassblown (3D) resonators. The test resonator demonstrated 866kHz, 1.46MHz and 1.59MHz for N=1, N=2, and N=3 modes and the corresponding Q-factors of 1500, 1300 and 1600, all in vacuum of 0.4mT.

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“…To achieve mode-matching and high Q performance in a hemispherical resonator, geometric uniformity and symmetry in combination with a low thermoelastic damping structural material are critical. Materials such as polysilicon [8,9], silicon nitride [4], and glass [10] have been used as the structural material for these resonators, and many different methods have been employed to create these hemispherical structures, including wafer-scale glass blowing [11], bulk silicon etching [9,12] and a combination of precision machining and bulk etching [13,14].…”

Section: Introductionmentioning

confidence: 99%

Hemispherical wineglass resonators fabricated from the microcrystalline diamond

Heidari

Chan

Yang

et al. 2013

J. Micromech. Microeng.

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We present the development of millimeter scale 3D hemispherical shell resonators fabricated from the polycrystalline diamond, a material with low thermoelastic damping and very high stiffness. These hemispherical wineglass resonators with 1.1 mm diameter are fabricated through a combination of micro-electro discharge machining (EDM) and silicon micromachining techniques. Using piezoelectric and electrostatic excitation and optical vibration measurement, the elliptical wineglass vibration mode is determined to be at 18.321 kHz, with the two degenerate wineglass modes having a relative frequency mismatch of 0.03%. A study on the effect of the size and misalignment of the anchor and resonator's radius variation on both the average frequency and frequency mismatch of the 2θ elliptical vibration modes is carried out. It is shown that the absolute frequency of a wineglass resonator will increase with the anchor size. It is also demonstrated that the fourth harmonic of radius variation is linearly related to the frequency mismatch.

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3D-soule: A fabrication process for large scale integration and micromachining of spherical structures

Cited by 19 publications

References 10 publications

High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG

High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG

The concept of "collapsed electrodes" for glassblown spherical resonators demonstrating 200:1 aspect ratio gap definition

Hemispherical wineglass resonators fabricated from the microcrystalline diamond

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