“…Lateral confinement can also be achieved in planar waveguiding films by etching rib or ridge waveguide structures. Etching techniques include Ar-ion beam etching [36,68,128,131,133,201], etching either the substrate [123,125] or over-layer (striploading) [40,87,150,174], reactive ion etching (RIE) [32,59,75,108,109,137,138,145,153,156,169,170,175,176,193], and wet chemical etching [79,129,152,157,166,177]. Of these etching methods, RIE provides the best control and resolution.…”