2004
DOI: 10.1063/1.1829141
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4.25 dB gain in a hybrid silicate/phosphate glasses optical amplifier made by wafer bonding and ion-exchange techniques

Abstract: Er:Yb-doped oxyfluoride silicate glass waveguide amplifier fabricated using femtosecond laser inscription Appl. Phys. Lett. 90, 131102 (2007); 10.1063/1.2716866 Direct imaging of the end-of-range and surface profiles of proton-beam written erbium-doped waveguide amplifiers by atomic force microscopy J. Appl. Phys. 98, 033533 (2005); 10.1063/1.2001748Three-photon phenomena in the upconversion luminescence of erbium-ytterbium-codoped phosphate glass

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Cited by 30 publications
(14 citation statements)
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“…The refractive index modification occurs at the focal point of the high-energy pulses and in the ion-implanted region for femtosecond laser writing and focused proton beam writing, respectively. He + ion implantation [99], ion exchange [118,119,123,125,130,136,144,146,148,149,[198][199][200], and ion indiffusion [34,81] are also used to alter the local refractive index through photolithography and patterning over a large wafer area. Typically, the index change which results from these methods is on the order of 1¢10 3 to 1¢10 2 .…”
Section: Waveguide Fabrication Methodsmentioning
confidence: 99%
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“…The refractive index modification occurs at the focal point of the high-energy pulses and in the ion-implanted region for femtosecond laser writing and focused proton beam writing, respectively. He + ion implantation [99], ion exchange [118,119,123,125,130,136,144,146,148,149,[198][199][200], and ion indiffusion [34,81] are also used to alter the local refractive index through photolithography and patterning over a large wafer area. Typically, the index change which results from these methods is on the order of 1¢10 3 to 1¢10 2 .…”
Section: Waveguide Fabrication Methodsmentioning
confidence: 99%
“…Lateral confinement can also be achieved in planar waveguiding films by etching rib or ridge waveguide structures. Etching techniques include Ar-ion beam etching [36,68,128,131,133,201], etching either the substrate [123,125] or over-layer (striploading) [40,87,150,174], reactive ion etching (RIE) [32,59,75,108,109,137,138,145,153,156,169,170,175,176,193], and wet chemical etching [79,129,152,157,166,177]. Of these etching methods, RIE provides the best control and resolution.…”
Section: Waveguide Fabrication Methodsmentioning
confidence: 99%
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“…Over the last two decades there has been significant interest in rare-earth-ion-doped planar waveguide amplifiers [1][2][3][4][5][6][7][8][9] for integrated optical applications. Such low-cost, compact components can be very useful for amplifying optical signals at a high data rate of 170 Gbit/s [8] and compensating optical losses owing to waveguide materials, signal routing, and input/output coupling within an integrated optical circuit.…”
Section: Introductionmentioning
confidence: 99%
“…9,10 In 2004, Gardillou et al demonstrated the possibility to associate a thin amplifying layer with a glass ion-exchanged waveguide in order to obtain a hybrid silicate/phosphate glass optical amplifier with 4.25 dB of gain. 11 Epoxy-free wafer bonding has also been successfully used to realize a polarization-insensitive Bragg filter on ion-exchanged waveguide. 12 In such a hybrid structure, the active layer thickness is limited by the required single mode operation of the device and by the interaction of light with the ion-exchanged waveguide, which must be strong enough to ensure an efficient lateral confinement of the guided mode.…”
mentioning
confidence: 99%