4-(tert-Butoxycarbonyloxy)benzylp-toluenesulfonates as acid amplifiers applicable to chemically amplified photoresists

Fluorine-Stabilized Acid Amplifiers for Use in EUV Lithography

“…The undesirable decomposition pathway is uncatalyzed thermal decomposition which results in the formation of an olefin byproduct and an acid. Several acid amplifiers (20-30) were reported in the literature [6][7][8][9][10][11][12][13] prior to the beginning or our research in 2005.…”

Tris(silyl)trifluoromethanesulfonates and their tetrakis(silyl) analogues as potential catalysts in photoinitiated cationic polymerization

“…They include, e.g. acetoacetate derivatives [5], b-sulphonyloxyacetals [6] benzyl and diol sulphonates [7,8], trioxane derivatives [9] and pentafluorobenzoic acid esters [10].…”

Phototriggered Acid Proliferation to Enhance Photosensitivity of Chemically Amplified Photoresists

“…[7] The novel nonlinear organic reaction involves an acid-catalyzed decomposition of an organic compound termed as an acid amplifier, which releases another strong organic acid, leading to the autocatalytic decomposition of the parent molecules. Our efforts have been focused on the development of the acid amplifiers derived from acetoacetates, [7,8] b-sulfonyloxyketals, [9,10] 1,2-diol monosulfonates, [11,12] 1,4-diol disulfonates, [13] trioxane derivative [14] and benzyl sulfonates [15] so far. These acid amplifiers are applicable to various photoinitiation systems utilizing acid-catalyzed reactions by the combination with photoacid generators.…”