41‐2: Invited Paper: Active‐matrix Digital Microfluidics System for High‐Throughput Droplet Sample Processing

Abstract

We introduce a high‐throughput field programmable active‐matrix digital microfluidics system designed for large‐scale biological experiments. The fabricated microfluidics chip consists of a 640×280‐pixel array, each pixel measuring at 100×100 μm . This configuration enables the addressing of individual pixels, facilitating parallel droplet manipulation. The system utilizes 9T2C GOA circuits for generating row scanning signals, and 3T1C pixel circuits to provide driving voltage to individual pixels. The system exhibited a notably elevated proficiency in high‐resolution droplet generation and manipulation, with over 80% droplet division success rate and more than 20 hours of stable single‐droplet movement. The minimum volume of an individual droplet amenable to stable manipulation is 1.2 nL, featuring a droplet resolution of four pixels, which is two orders of magnitude less than the previously reported volume at IEDM. This research lays the foundation for the utilization of digital microfluidics in the realms of in vitro diagnostics and biological and chemical experiments focused on single‐cell analyses.