43- and 50-Mp High-Performance Interline CCD Image Sensors

Wang, Shen; Brolly, Richard P.; Carpenter, Douglas A.; DeJager, Adam; Doran, Jim; Fabinski, Robert P.; Frank, Tom; Kather, Ryan; Kosman, Stephen L.; Lum, Alden K.; McCarten, J.; Meisenzahl, Eric J.; Mersich, Peter T.; Stevens, Eric G.; Summa, Joseph R.; Tivarus, C.; Tobey, Brian

doi:10.1109/ted.2019.2891414

Cited by 3 publications

(1 citation statement)

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“…Optimizations for P-N junctions can effectively reduce charge diffusion in the p-well below the photodiode [11], [12], [13], [14]. Moreover, double layer design and material replacement of the light shield can further avoid light penetration [7], [8], [15], [16]. Furthermore, the optimization of on-chip lenses used to guide light onto photodiodes was reported, which controls light leakage [17].…”

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Analysis and Correction of Smeared Image From Interline-Transfer CCD in Beam Quality Measurement

et al. 2022

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The smear effect caused by light penetration of interline-transfer (IT) CCD in beam quality measurement (BQM) is detrimental and not analyzed pertinently. This report proposes a mathematical model and a correction method for the smeared image. The smear noise is fitted and subtracted through its correlation with the light signal obtained from the model and pre-calibration. The application in BQM is presented by measuring beam quality factor M 2 and power in the bucket (PIB). The results verify the validity of the method. An evaluation standard of the correction effect is also recommended. Index Terms-Charge-coupled-device (CCD) image sensor, interline transfer (IT), laser beams. I. INTRODUCTION C CD sensors are widely used in beam quality measurement (BQM) to image the cross-section spot and reproduce its intensity distribution [1], [2], [3], [4]. Interline-transfer (IT) CCD is one of the most typical structures. Its signal charges are transferred from the photodiode to the vertical CCD (V-CCD) after the photosensitivity, then enter the horizontal CCD (H-CCD) for amplification and readout [5]. IT-CCD has a balanced performance in terms of high frame rate, imaging quality and sensitivity [6], [7], [8]. The smear effect is a common error source for IT-CCD, which is caused by light penetration through the light shield on VCCD, light leakage from diffraction, refraction, and waveguide effect on CCD surface, or charge diffusion during signal transfer in V-CCD [9], [10]. Generally, it appears as vertical line noise across the image.

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