4D STEM: High efficiency phase contrast imaging using a fast pixelated detector

Yang, Hao; Jones, Lewys; Ryll, H.; Simson, M.; Soltau, H.; Kondo, Yukihito; Sagawa, Ryusuke; Banba, Hiroyuki; MacLaren, Ian; Nellist, Peter D.

doi:10.1088/1742-6596/644/1/012032

Cited by 51 publications

(36 citation statements)

References 19 publications

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“…Although ultrafast cameras89101112131415 are currently introduced to the field of low-angle STEM, our approach exhibits several advantages. As quantitative analyses of atomically resolved STEM intensities rely on Voronoi diagrams16, Gaussian mixture models1718 or probe integrated cross sections19, each atomic column must be sampled with a sufficient number of probe positions.…”

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confidence: 99%

Materials characterisation by angle-resolved scanning transmission electron microscopy

Müller‐Caspary

Oppermann

Grieb

et al. 2016

Sci Rep

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Solid-state properties such as strain or chemical composition often leave characteristic fingerprints in the angular dependence of electron scattering. Scanning transmission electron microscopy (STEM) is dedicated to probe scattered intensity with atomic resolution, but it drastically lacks angular resolution. Here we report both a setup to exploit the explicit angular dependence of scattered intensity and applications of angle-resolved STEM to semiconductor nanostructures. Our method is applied to measure nitrogen content and specimen thickness in a GaNxAs1−x layer independently at atomic resolution by evaluating two dedicated angular intervals. We demonstrate contrast formation due to strain and composition in a Si- based metal-oxide semiconductor field effect transistor (MOSFET) with GexSi1−x stressors as a function of the angles used for imaging. To shed light on the validity of current theoretical approaches this data is compared with theory, namely the Rutherford approach and contemporary multislice simulations. Inconsistency is found for the Rutherford model in the whole angular range of 16–255 mrad. Contrary, the multislice simulations are applicable for angles larger than 35 mrad whereas a significant mismatch is observed at lower angles. This limitation of established simulations is discussed particularly on the basis of inelastic scattering.

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confidence: 99%

Materials characterisation by angle-resolved scanning transmission electron microscopy

Müller‐Caspary

Oppermann

Grieb

et al. 2016

Sci Rep

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“…With the full 2D CBED patterns at every pixel, any shape and size of a virtual image detector can be formed digitally [4,8,16]. Synthesizing conventional STEM images is a good starting point for further data analysis, allowing the quality of the 4D datasets to be evaluated.…”

Section: Quantitative Imaging From 4d Datasetsmentioning

confidence: 99%

“…Recent developments in fast-readout pixel detectors and powerful computers significantly improve the speed of data acquisition and transfer, and make possible the acquisition of two-dimensional CBED patterns with two dimensional probe scanning positions -a four dimensional (4D) dataset -at atomic resolution [5][6][7]. Such 4D datasets have been shown to allow synthesizing multiple imaging modes [4,8], differential phase contrast imaging [6] and ptychographic phase reconstruction [7,9]. However, the full potential of 4D datasets for quantitative analysis has yet to be established.…”

Section: Introductionmentioning

confidence: 99%

Practical aspects of diffractive imaging using an atomic-scale coherent electron probe

et al. 2016

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a b s t r a c tFour-dimensional scanning transmission electron microscopy (4D-STEM) is a technique where a full twodimensional convergent beam electron diffraction (CBED) pattern is acquired at every STEM pixel scanned. Capturing the full diffraction pattern provides a rich dataset that potentially contains more information about the specimen than is contained in conventional imaging modes using conventional integrating detectors. Using 4D datasets in STEM from two specimens, monolayer MoS 2 and bulk SrTiO 3 , we demonstrate multiple STEM imaging modes on a quantitative absolute intensity scale, including phase reconstruction of the transmission function via differential phase contrast imaging. Practical issues about sampling (i.e. number of detector pixels), signal-to-noise enhancement and data reduction of large 4D-STEM datasets are emphasized.

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“…4D-STEM can deliver much more structural information [1,2] than conventional STEM where only integrated electron intensities are acquired. The 4D dataset of CBED patterns can be utilized for structural analysis such as ptychographic reconstruction [3][4][5][6][7][8][9], strain mapping [10][11][12], electric and magnetic fields imaging using differential phase contrast [13,14], and composition and thickness measurements [15] with position-averaged CBED (PACBED) [16].…”

Section: Introductionmentioning

confidence: 99%

4D-Data Acquisition in Scanning Confocal Electron Microscopy for Depth-Sectioned Imaging

Hamaoka

Hashimoto

Mitsuishi

et al. 2018

e-J. Surf. Sci. Nanotech.

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We propose an experimental depth-sectioned imaging method based on annular dark-field scanning confocal electron microscopy (ADF-SCEM). Four-dimensional (4D) datasets, consisting of 2D probe images taken at every probe position during 2D raster scanning, were acquired with an aberration-corrected scanning transmission electron microscope. A series of depth-sectioned images were constructed by processing a single 4D dataset. A pinhole and a stage-scan system used in earlier studies were not required in the present data acquisition. Optimal observation conditions for the 4D data acquisition in the ADF-SCEM mode are outlined from multislice simulations.

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4D STEM: High efficiency phase contrast imaging using a fast pixelated detector

Cited by 51 publications

References 19 publications

Materials characterisation by angle-resolved scanning transmission electron microscopy

Materials characterisation by angle-resolved scanning transmission electron microscopy

Practical aspects of diffractive imaging using an atomic-scale coherent electron probe

4D-Data Acquisition in Scanning Confocal Electron Microscopy for Depth-Sectioned Imaging

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