4H-SiC Schottky Barrier Diodes as Radiation Detectors: A Review

Abstract

In this review paper, an overview of the application of n-type 4H-SiC Schottky barrier diodes (SBDs) as radiation detectors is given. We have chosen 4H-SiC SBDs among other semiconductor devices such as PiN diodes or metal-oxide-semiconductor (MOS) structures, as significant progress has been achieved in radiation detection applications of SBDs in the last decade. Here, we present the recent advances at all key stages in the application of 4H-SiC SBDs as radiation detectors, namely: SBDs fabrication, electrical characterization of SBDs, and their radiation response. The main achievements are highlighted, and the main challenges are discussed.

SiC detectors: A review on the use of silicon carbide as radiation detection material

“…Typical concentrations of Z 1/2 in the as-prepared material are 10 11 -10 13 cm −3 . The defect appears as a peak with a maximum at about 320 °K in the DLTS spectrum [9]. A broad peak in the DLTS spectrum at about 650 °K is the signature of the EH 6/7 deep level defect [9].…”

“…Detailed reviews on the different ingredients of a SiC detector recipe can be found in Refs. [4,5,9,[20][21][22][23][24]. Although a detailed description of the fabrication techniques of a SiC detector is behind the scope of this paper, this Section summarizes the main aspects of the growth/deposition techniques and the properties of the above-mentioned building blocks.…”

“…Donor and acceptor states associated with carbon vacancy (V c ) are referred to as Z 1/2 and EH 6/7 , respectively. They dominate over other types of defects in the as-grown 4H-SiC material [9,17,45,46]. The V c defect has a rather low formation energy of 4.8 eV [47] and forms during high temperature annealing (without irradiation).…”

“…Concerning the Schottky contact area, usually determined by the opening of the mask used for metal deposition, common values in SiC detectors are between 1 and 20 mm 2 [9].…”

“…Progress in SiC detector fabrication continues today, and with it the diffuse interest of researchers around the World in evaluating the performance of SiC detectors of increasingly good quality. There are many reviews on the subject of Silicon Carbide as a radiation detector material, such as those by [4][5][6][7][8], and Capan in 2022 [9]. The idea behind this review is to give readers as complete and up-to-date a summary as possible on SiC radiation detectors.…”