5-1:<i>Invited Paper</i>: ‘Steering’ Light with Texas Instruments Digital Micromirror Device (DMD) - Past, Present &amp; Future

Ballard, Brian; Bhakta, Vikrant R.; Douglass, Michael R.; Gelabert, P.; Kempf, Jeff; McDonald, William C.; Pettitt, Greg; Rancuret, Paul; Rankin, Alan; Thompson, Jason; Oden, P. I.

doi:10.1002/sdtp.10590

Cited by 5 publications

(5 citation statements)

References 2 publications

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“…Micro-opto-electro-mechanical systems (MOEMS) for light processing have been fabricated and studied for various applications. Micromirror array-based MOEMS have been reported for N × N switches in wavelength division multiplexing, 1-3 beamers, 4,5 light steering via smart glazing for buildings, 6,7 and adaptive optics. 8,9 In adaptive optics, the applications are high-order correction of optical aberrations to be used in astronomy, maskless lithography, microscopic medical technology, laser micromachining, and optical free space communication.…”

Section: Introductionmentioning

confidence: 99%

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MOEMS micromirror arrays in smart windows for daylight steering

Hillmer

Iskhandar

Hasan

et al. 2021

J. Optical Microsystems

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Micro-opto-electro-mechanical systems (MOEMS) micromirror and shutter arrays have gained huge interest in research and applications. Our study starts with an overview on the technological achievements and experimental results of groups that have been working on this field. The main part of our study is revealing the MOEMS micromirror array technology for light steering via smart glazing for buildings. The mirror array is actuated electrostatically and integrated between the panes of insulation glazing. Depending on user activity as well as daytime and season requirements, the MOEMS micromirror arrays shall enable personalized light steering, energy saving, and reduction of CO 2 emission. Technological fabrication of subfield addressing up to 64 fields inside the arrays is presented. Experimental characterization results such as actuation voltages, maximum and minimum transmission, contrast, and energy saving potential are reported. Using an industrial window module fabrication process, a laboratory demonstrator and a function demonstrator have been implemented. Rapid aging tests including vibrations, extreme temperatures, multiple temperature cycles, and long-term electrostatic actuation of micromirror structure were performed to evaluate reliability and lifetime. These results validate extrapolated lifetimes-in future applications as active windows-far beyond 40 years, as well as their robustness during transportation, installation, and against all vibration influences in buildings. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Introductionmentioning

confidence: 99%

“…Note that some adaptive optics are based on freeform reflectors. 10,11 The mirror arrays for switches and beamers [1][2][3][4][5] are Si-based and the mirrors are automatically planar by MOEMS standard processing. The mirrors for light steering in smart glazing are metal-based 6,7 and nearly planar due to partial stress compensation.…”

Section: Introductionmentioning

confidence: 99%

MOEMS micromirror arrays in smart windows for daylight steering

Hillmer

Iskhandar

Hasan

et al. 2021

J. Optical Microsystems

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“…If large stopbands are desired, the refractive index Digital micromirror device (DMD) technology uses silicon mirrors with two stable positions, allowing fast switching in between (Figure 7). The corresponding silicon-based electronic control is located below each micromirror (each pixel) [20,21]. This system allows digital projection and can be used for beamer and programmable projections, sensing applications, and even inside optical and interference microscopes.…”

Section: Compound Semiconductor Mems Micromirror Arraysmentioning

confidence: 99%

State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications

Liu,

Kästner,

Donatiello

et al. 2024

Photonics

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This work provides an overview on micromirror arrays based on different material systems such as dielectrics, element silicon, compound semiconductors, metals, and novel 2D materials. The goal is to work out the particular strength of each material system to enable optimum performance for various applications. In particular, this review is intended to draw attention to the fact that MEMS micro-mirrors can be successful in many other material systems besides silicon. In particular, the review is intended to draw attention to two material systems that have so far been used less for MEMS micromirror arrays, that have been less researched, and of which fewer applications have been reported to date: metallic heterostructures and 2D materials. However, the main focus is on metallic MEMS micromirror arrays on glass substrates for applications like personalized light steering in buildings via active windows, energy management, active laser safety goggles, interference microscopy, and endoscopy. Finally, the different micromirror arrays are compared with respect to fabrication challenges, switching speed, number of mirrors, mirror dimensions, array sizes, miniaturization potential for individual mirrors, reliability, lifetime, and hinge methodology.

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“…Analyzing and rendering the results on this hypercube requires lengthy post-processing, and this even when only the analysis of one or smaller, well-defined regions of the object is of interest. Here we propose a novel spectral analysis ROI selection system based on the use of a digital light Processing (DLP) 3,4 component. The system consists of a compact, modular optical device capable of targeting a ROI of an object by using a pointlike characterization sensor.…”

Section: Introductionmentioning

confidence: 99%

System for optical characterization of an object's zone of interest for ophthalmology

Thomas,

Residori,

Bortolozzo

et al. 2024

Emerging Digital Micromirror Device Based Systems and Applications XVI

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Using a digital micromirror device (DMD) coupled to two array sensors, we have set up a compact modular system that enables a region of interest of an object to be targeted using a quasi-one-dimensional or point-like characterization device. The system acts as an optical compressor, reducing the amount of data needed to analyze a region of interest of the object under test. At the aim of applying this approach for the spectral characterization of the eye, a spectrometer is used to carry out spectral measurements of the selected region of interest. The results presented have enabled us to validate the proof of concept of our system with preliminary tests on ex-vivo corneas. Applications in the field of ophthalmology are foreseen and being studied for early diagnosis of eye diseases.

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5-1:Invited Paper: ‘Steering’ Light with Texas Instruments Digital Micromirror Device (DMD) - Past, Present & Future

Cited by 5 publications

References 2 publications

MOEMS micromirror arrays in smart windows for daylight steering

MOEMS micromirror arrays in smart windows for daylight steering

State-of-the-Art Materials Used in MEMS Micromirror Arrays for Photonic Applications

System for optical characterization of an object's zone of interest for ophthalmology

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