5.2: Grating Light Valve™ Technology: Update and Novel Applications

Amm, D. T.; Corrigan, R. W.

doi:10.1889/1.1833752

Cited by 31 publications

(15 citation statements)

References 3 publications

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“…One of the most important advantages of GLVs over other optical MEMS is its intrinsic analog capability of producing gray scales [22] as shown in figure 12. Other digital modulators use pulse width modulation (PWM) to achieve gray scales which directly erodes the data throughput of the devices.…”

Section: Though Theoretically the Maximum Achievable Intensity In The ±1mentioning

confidence: 99%

Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves

Rudra

Coster

Hoof

et al. 2012

Sensors and Actuators A: Physical

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Grating Light Valve (GLV) display pixels are reflection type diffraction gratings consisting of electrostatically movable coplanar microbeams. Once actuated, the alternate movable beams deflect downwards which produces controlled diffraction of light creating bright and dark pixels in a display system. GLV displays provide a huge improvement in contrast ratio and resolution over other MOEMS devices. At the same time, compared to hybrid integration, post processing of MEMS monolithically on top of CMOS can lead to increased functionality, performance and reliability. Poly-SiGe structural layers can be deposited at low temperature (~450°C), allowing to retain the performance of underlying CMOS electronics though possessing the desired material properties for MEMS. Hence the aim of this work is to fabricate CMOS compatible poly-SiGe GLVs and to study their static and dynamic behavior. A novel process flow was developed regarding the deposition of thin poly-SiGe structures which is well within the maximum thermal range to retain the full functionality of the underlying CMOS circuitry. A contrast of over 1500:1 was obtained showing excellent optical response of the devices. The effect of squeeze film damping in determining the dynamic response of the GLVs is thoroughly investigated. Influence of variation in dimensional parameters on the settling time of the structures is discussed in detail. A minimum settling time of 2 µs was achieved for our devices. We also showed the analog gray scale nature of the GLVs. In addition, we also use the technique of mechanical stoppers to avoid accidental destruction of the devices because of the pull-in phenomenon.

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Section: Though Theoretically the Maximum Achievable Intensity In The ±1mentioning

confidence: 99%

Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves

Rudra

Coster

Hoof

et al. 2012

Sensors and Actuators A: Physical

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“…The grating light valve consists of a large number of individually addressed small diffraction gratings [84]. Depending on the voltage applied the grating acts on the illuminating light either as a reflecting mirror or as a diffracting element with an analog diffraction response behavior.…”

Section: Micromechanical Light Valve Projectionmentioning

confidence: 99%

Display Technology

Theis

2008

Ullmann's Encyclopedia of Industrial Chemistry

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The article contains sections titled: 1. Introduction 2. Display Categories 3. Cathode Ray Tubes (CRTs) 3.1. Color CRTs 3.2. Electron Optics 3.3. Phosphors 3.4. Trends 4. Flat Panels and Matrix Addressing 4.1. Light‐Generating (Active) Displays 4.1.1. Gas Discharge 4.1.1.1. Alternating‐Current Plasma Displays 4.1.1.2. Plasma Display Addressing 4.1.1.3. Remaining Problems for Plasma Displays 4.1.2. Cathodoluminescence 4.1.2.1. Vacuum Fluorescence Displays (VFDs) 4.1.2.2. Field‐Emission Displays (FEDs) 4.1.3. Electroluminescence 4.1.3.1. Visible Light Emitting Diodes (LEDs) 4.1.3.2. Organic and Polymer Light Emitting Diodes 4.1.3.3. Electroluminescence in Inorganic Materials 4.2. Light Modulating (Passive) Displays 4.2.1. Liquid Crystal Displays 4.2.1.1. Fundamental Operation 4.2.1.2. Simple Matrix‐Addressed LCDs 4.2.1.3. Novel Addressing Schemes for Direct‐Addressed STN LCDs 4.2.2. Reflective LCDs for Low‐Power Systems 4.2.2.1. Reflective LCDs with Polarizers 4.2.2.2. Polarizer‐Free Reflective LCDs 4.2.3. Bistable Liquid Crystal Devices 4.2.4. Active Matrix‐Addressed Liquid Crystal Displays (AMLCDs) 4.2.4.1. Fundamental Properties 4.2.4.2. Manufacturing Issues 4.2.4.3. Viewing Angle Improvements 4.2.4.4. System Performance 4.2.4.5. Large Area Liquid Crystal Displays 4.2.5. Microparticle‐Based Displays 4.2.5.1. Electrophoretic Displays 4.2.5.2. Rotating Ball Displays (Gyricon) 4.2.6. Direct View Microelectromechanical Systems 5. Projection Displays 5.1. Projection CRT 5.2. Liquid Crystal Projection 5.2.1. Transmissive Projection LCDs 5.2.2. Reflective Projection LCDs 5.3. Micromechanical Light Valve Projection

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“…Miniature scanner technologies have been employed in 1) scanning confocal microscopy, a powerful optical imaging method that can achieve sub-cellular resolution in real time [1][2][3][4], 2) portable, lightweight, low-power, inexpensive projection video displays with high information content [5][6][7][8][9], and 3) near-eye virtual displays like head-mounted displays (HMD) [10][11][12][13][14]. Most miniature scanner technologies utilize MEMS scanner mirrors.…”

Section: Introductionmentioning

confidence: 99%

2D MEMS electrostatic cantilever waveguide scanner for potential image display application

Lin

Wang

2015

MATEC Web of Conferences

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Abstract. This paper presents the current status of our micro-fabricated SU-8 2D electrostatic cantilever waveguide scanner. The current design utilizes a monolithically integrated electrostatic push-pull actuator. A 4.0 μm SU-8 rib waveguide design allows a relatively large core cross section (4μm in height and 20 μm in width) to couple with existing optical fiber and a broad band single mode operation (λ= 0.7μm to 1.3μm) with minimal transmission loss (85% to 87% output transmission efficiency with Gaussian beam profile input). A 2D scanning motion has been successfully demonstrated with two fundamental resonances found at 202 and 536 Hz in vertical and horizontal directions. A 130 μm and 19 μm, corresponding displacement and 0.062 and 0.009 rad field of view were observed at a +150V input. Beam divergence from the waveguide was corrected by a focusing GRIN lens and a 5mm beam diameter is observed at the focal plane. The transmission efficiency is low (~10%) and cantilever is slightly under tensile residual stress due to inherent imperfection in the process and tooling in fabrication. However, 2D light scanning pattern was successfully demonstrated using 1-D push-pull actuation.

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5.2: Grating Light Valve™ Technology: Update and Novel Applications

Cited by 31 publications

References 3 publications

Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves

Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves

Display Technology

2D MEMS electrostatic cantilever waveguide scanner for potential image display application

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