5.3 A Highly Digital 2210μm² Resistor-Based Temperature Sensor with a 1-Point Trimmed Inaccuracy of ± 1.3 ° C (3 σ) from -55 ° C to 125 ° C in 65nm CMOS

A 0.7 V R‐2R SAR ladder‐based temperature sensor with less supply sensitivity

“…The bold value “0.003” shows this paper has the lowest Resolution FOM, compared to the references listed in the table. “7” shows the power supply sensitivity of this paper is smaller than ref [4].…”

“…Furthermore, they should be compatible with the digital voltage supply level, which scales down with modern technology nodes [2]. In previously published resistor-based temperature sensors [3,4], the complementary thermal dependency of the on-chip silicided and the non-silicided resistors are exploited and the resistors' thermal coefficient is converted into a temperature dependent voltage, current or time delay, which is quantised by the following ADCs, for example, a continuous time delta-sigma modulator, or, a Time-to-Digital Converter (TDC). To reduce the power supply level and the power supply sensitivity, this paper presents a temperature sensor with the following features.…”

“…b 3 σ accuracy/temperature range, in reference to[6]. * Post-layout simulation results while[2][3][4] are measurement results.in Table1. The advantages of the proposed temperature are its lower supply voltage, supply voltage sensitivity and Resolution FOM.…”

Design of an integrated temperature and humidity sensor based on high dynamic range utilization rate ADC

“…In temperature measurement, bipolar junction transistor (BJT) based temperature sensor is the most widely used because it can achieve high accuracy over a wide temperature range [6,7,8,9,10] compared to resistor [11,12] or MOS [13,14,15] based temperature sensors. In a variety of humidity sensing probes materials [16,17,18,19,20], polyimide has attracted more attention due to its compatibility with CMOS process.…”