63.3: Back‐exposure Manufacturing Route for MEMS Reflective Display

Abstract

In this study, we attempted a new manufacturing route for an interferometric modulator type MEMS display. Instead of conventional pattern forming process, we developed backexposure procedure combined with lift-off process to reduce the number of masks and alignment steps used. The pixel structure manufactured revealed that this new procedure is capable of producing the device with high accuracy and quality.

26.1: Invited Paper: Driving mirasol® Displays: Addressing Methods and Control Electronics

“…Reflective displays based on interference modulation devices (IMODs) have received considerable attention because of their good fit to mobile applications [1][2][3][4][5]. These displays have the advantages of: excellent readability in sunlight, generation of color without filters, no polarization, a manufacturing process which leverages existing large area equipment and processes, video rate operation and a near zero power hold state.…”