8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE<sub>01</sub> Mode Microwave

Hidaka, Ryota; Yamaguchi, Toru; Hirotsu, Nobuyoshi; Ohshima, Tomoko; Koga, Ryuji; Tanaka, Masayoshi; Kawai, Yoshinobu

doi:10.1143/jjap.32.174

Cited by 26 publications

(8 citation statements)

References 9 publications

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“…Recently, it seems that Watanabe et a1 at Hitachi [19] succeeded in producing a 300 mm diameter ECR plasma with TEol mode [7]. An ECR plasma with the electron density higher than the L cutoff will be necessary for CVD to increase the deposition rate, which is one of hture problems concerning ECR plasma sources.…”

Section: Resultsmentioning

confidence: 99%

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Production of Large Diameter ECR Plasma

Kawai

Ueda

1997

J. Phys. IV France

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Abstract. The production of a large diameter ECR plasma with microwaves of frequency 2.45 GHz is reviewed, including our experimental results with a multi-slot antenna and a TEol mode microwave converter. It is pointed out that the electromagnetic waves play an important role in plasma uniformity as well as plasma production. Furthermore, it is found that the X wave contributes to plasma uniformity for electron density of (1-2)x10'~m-~ which almost corresponds to the L cutof

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Section: Resultsmentioning

confidence: 99%

“…In order to realize a uniform and dense ECR plasma, we developed a new type of ECR plasma source [7] using a circular TE,, microwave mode which is converted from the principal rectangular mode TE1,. The ion 2 saturation current 9nsity of 360 A/m was achieved for the input microwave power of 3 kW at nitrogen pressure of 5 X 10 Torr.…”

Section: -3mentioning

confidence: 99%

Production of Large Diameter ECR Plasma

Kawai

Ueda

1997

J. Phys. IV France

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“…The diffusion of electrons across the magnetic field in magnetized plasma, which is due to their collisions with neutrals and ions, decreases with decreasing pressure at a constant density of plasma [4,5]. Magnetic traps in MW reactors are often developed using electromagnets [6][7][8] which require a high-power current source and, as a rule, water cooling of the turns. Such magnet systems are very bulky; however, they offer a possibility of simple variation of the magnetic field and of the parameters of magnetic trap.…”

Section: Introductionmentioning

confidence: 99%

An investigation of the heating of electrons in multipolar magnet systems and design of low-pressure electron-cyclotron-resonance microwave-frequency reactors

Petrin

2006

High Temp

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The problem is treated of sustaining plasma in low-pressure electron-cyclotron-resonance plasma reactors in which the main source of ionization is provided by fast electrons blocked in magnetic traps of multipolar magnet systems. The electron-cyclotron heating of electrons by the electric field of a microwave is analyzed. The numerical simulation of the electron motion in magnet systems of various configurations and statistical processing of the calculation results are used to simulate the high-energy part of the electron energy distribution function. It is demonstrated that the main factor defining the electron loss in magnetic traps in the collisionless limit is the departure of fast electrons from magnetic traps to the boundaries of the structure among other things. Comparison is made of different multipolar magnet systems, and the principles of designing optimal electron-cyclotron-resonance MW reactors are formulated.

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“…The diffusion of electrons across the magnetic field in magnetized plasma, which is due to their collisions with neutrals and ions, decreases with decreasing pressure [4,5]. Magnetic traps in MW reactors are often developed with the aid of electromagnets [6][7][8] which require a high-power current source and, as a rule, water cooling of the turns. Such magnet systems are very bulky; however, they offer a simple method of varying the magnetic field and the parameters of magnetic trap.…”

Section: Introductionmentioning

confidence: 99%

The Heating of Electrons in Magnetic Traps of Low-Pressure Electron-Cyclotron-Resonance Microwave-Frequency Reactors

Petrin

2005

High Temp

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Methods are analyzed of maintaining plasma in low-pressure electron-cyclotron-resonance reactors in which the ionization is caused by fast electrons blocked in traps developed by permanent magnets. The key part played by zones of electron-cyclotron heating of electrons by the electric field of the wave is treated. The mathematical simulation of the electron motion in magnetic traps is used to investigate the effect of the size of magnetic traps on the efficiency of heating, and the principles of designing electron-cyclotronresonance plasma MW (microwave-frequency) reactors are formulated.

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8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE₀₁ Mode Microwave

Cited by 26 publications

References 9 publications

Production of Large Diameter ECR Plasma

Production of Large Diameter ECR Plasma

An investigation of the heating of electrons in multipolar magnet systems and design of low-pressure electron-cyclotron-resonance microwave-frequency reactors

The Heating of Electrons in Magnetic Traps of Low-Pressure Electron-Cyclotron-Resonance Microwave-Frequency Reactors

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8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE01 Mode Microwave

Cited by 26 publications

References 9 publications

Production of Large Diameter ECR Plasma

Production of Large Diameter ECR Plasma

An investigation of the heating of electrons in multipolar magnet systems and design of low-pressure electron-cyclotron-resonance microwave-frequency reactors

The Heating of Electrons in Magnetic Traps of Low-Pressure Electron-Cyclotron-Resonance Microwave-Frequency Reactors

Contact Info

Product

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8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE₀₁ Mode Microwave