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Cited by 27 publications
(14 citation statements)
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“…With increasing the overpotential the transients attain distinct current maxima characterizing the progressive and instantaneous nucleation with overlap of diffusion zones (see e.g. [8,[11][12][13][14][15][16][17][18][19][20]). This is particularly true for the semiconductor substrates [21,22] on which deposition of copper takes place at extremely high cathodic overpotentials.…”
Section: Discussionmentioning
confidence: 99%
“…With increasing the overpotential the transients attain distinct current maxima characterizing the progressive and instantaneous nucleation with overlap of diffusion zones (see e.g. [8,[11][12][13][14][15][16][17][18][19][20]). This is particularly true for the semiconductor substrates [21,22] on which deposition of copper takes place at extremely high cathodic overpotentials.…”
Section: Discussionmentioning
confidence: 99%
“…Comprehensive models for the electrodeposition of copper in acidic sulfate media have reported that Cu 2+ ions in solution are reduced in two consecutive 1-electron transfer steps [1][2][3][4][5][6][7][8][9][10][11][12]. This reaction pathway involves the formation of intermediate cuprous species.…”
Section: Introductionmentioning
confidence: 99%
“…In the literature, a clear distinction has been made to describe the phase of this intermediate formed in the first reduction step. Some studies [1][2][3][4][5][6] report that the cuprous species is adsorbed (Cu(I) ads ) on the substrate, whereas other authors [7][8][9][10][11][12] suggest that it is a soluble species (Cu + ) located on the solution side and close to the surface of the electrode.…”
Section: Introductionmentioning
confidence: 99%
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“…This last technique offers many advantages: it is the least expensive, it has the highest deposition rate, the lowest toxicity and is readily adoptable [1][2][3]. The main electrolytes used for copper electrodeposition are acidic and contain copper sulfate as a metal source [1,[4][5][6][7][8], but apparently electrical properties as well as resistance to corrosion have to be warranted. This can be achieved by small amounts of organic additives, such as DPS [9], PEG [9][10][11][12], SPS [10,11], IT-85 [13,14],thiourea [13,[15][16][17][18][19][20][21][22][23][24], to the copper electrolytes.…”
Section: Introductionmentioning
confidence: 99%