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Hassouni, K.; Leroy, O.; Farhat, S.; Gicquel, A.

doi:10.1023/a:1021845402202

Cited by 71 publications

(84 citation statements)

References 27 publications

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“…The growth rate increases from 2 to 16 mm/h as the concentration of methane increases from 2% to 7.2%. This behaviour is attributed to the variation of the concentration of CH 3 and atomic hydrogen at the diamond surface as reported elsewhere [15][16][17][18][19]. It can be noted that this evolution is non-linear: for a methane concentration in the range 2-6%, a super-linear increase is clearly observed whereas, at higher methane concentrations, the evolution becomes linear.…”

Section: Influence Of the Methane Concentrationsupporting

confidence: 78%

The control of growth parameters in the synthesis of high-quality single crystalline diamond by CVD

Achard

Tallaire

Sussmann

et al. 2005

Journal of Crystal Growth

107

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Section: Influence Of the Methane Concentrationsupporting

confidence: 78%

The control of growth parameters in the synthesis of high-quality single crystalline diamond by CVD

Achard

Tallaire

Sussmann

et al. 2005

Journal of Crystal Growth

107

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“…21,22 Table I shows how the power is dissipated in the plasma. The majority of it is dissipated through electron excitation of molecular hydrogen vibrational states.…”

Section: Resultsmentioning

confidence: 99%

Energy coupling efficiency of a hydrogen microwave plasma reactor

Gordon

Duten

Hassouni

et al. 2001

Journal of Applied Physics

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Articles you may be interested inNumerical analysis of a mixture of Ar/NH3 microwave plasma chemical vapor deposition reactor Characterization of the behavior of chemically reactive species in a nonequilibrium inductively coupled argonhydrogen thermal plasma under pulse-modulated operation Zero-dimensional and two-dimensional plasma models and optical emission spectroscopy are used in tandem to investigate the power coupling efficiency for a pure hydrogen microwave plasma. The zero-dimensional model accounts for the vibrational kinetics of H 2 , the chemistry of H 2 and H excited states, and the kinetics of ground-state species. The set of species conservation equations are then coupled to the electron Boltzmann equation ͑to account for the non-Maxwellian electron energy distribution function͒ and the total energy equation for solution. The two-dimensional model makes use of a simpler thermochemical description of the plasma. The chemistry is described with nine species and thirty chemical reactions. Three energy modes are considered to describe the plasma's thermal nonequilibrium, and Maxwellian distribution functions for kinetic and vibrational modes are assumed. The non-Maxwellian nature of the electron energy distribution function is separately accounted for. Experimentally, the absolute line emission intensity is utilized to obtain number densities of up to five hydrogen excited states using the following transitions: H␣ ͑6563 Å͒, H␤ ͑4861 Å͒, H␥ ͑4340 Å͒, H␦ ͑4102 Å͒, and H ͑3970 Å͒. The first three transitions were used for a 38 Torr, 1000 W hydrogen discharge, and all five transitions were used for a 121 Torr, 4000 W hydrogen discharge. The absolute continuum emission from the plasma was compared to numerical predictions. The comparison of the numerical and experimental data indicates that 90%-100% of the input power is deposited in the plasma and that both the line and continuum emission match within a factor of 3, with the exception of the high energy excited states for the 4000 W plasma. A control volume heat transfer analysis validates the energy coupling.

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“…Sudden decrease of electron temperature and increase of electron density are observed in 5 min and then their variations are stabilized. This variation may be closely related to the formation of CD 4 because the rate coefficients of dissociation and ionization of CD 4 are larger than D 2 , respectively, which are similar to the variations of plasma property observed in the H 2 plasma with inflow of CH 4 [9]. The effect of CD 4 addition on the bulk plasma property is evaluated by using the global modelling which contains the modified sputtering yield and the energy lost to the electronneutral collision processes.…”

Section: Resultsmentioning

confidence: 80%

“…Then it is expected that the morphological changes of graphite induce the increase of the sputtering yield due to the increase of local angle of ion incidence [7,8]. In addition, the methane (CD 4 ) formation from the graphite can change the plasma properties in the form of the decrease of electron temperature and the increase of electron density as observed in the H 2 plasma with inflow of CH 4 [9]. Thus, it can be expected that the morphological changes of graphite in the deuterium plasma increase the sputtering yield and change the scrape-off layer (SOL) plasma properties near graphite PFC.…”

Section: Introductionmentioning

confidence: 99%