A 100 kV 10 A high-voltage pulse generator for plasma immersion ion implantation

Abstract

The design of a high-voltage pulsing system for a plasma immersion ion implantation (PIII) facility is presented. A list of requirements, which have to be fulfilled by a high-voltage pulse generator to get best results and a optimum operation of the PIII system, is given. A simple electrical model of the plasma is presented which describes the plasma as a capacitive–resistive load. The model parameters are determined to fit experimental results. The requirements for the pulse generator can be fulfilled well using a pulse generator design which employs a hard tube switch. A pulse generator design is presented which is especially optimized for PIII systems. The hard tube control is especially optimized for obtaining voltage rise times as short as possible.

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

“…The 1990s were characterized by the desire to scale PBII facilities to higher voltages and sizes [47][48][49][50][51][52][53][54][55]. Characteristic achievements are summarized in Table I, indicating that the performance of these high-voltage facilities involved compromises between reactor dimensions, operating pressure range, and plasma density.…”

Comparison between two solid-state transformerless modulators for capacitive type load applications

“…The RC parameters shown in Fig 3 represent the static and dynamic behavior of the system, in particular the plasma load, the metallic chamber and electrical connection [10]. In this paper, R 1 =1000 Ω, R 2 =100 Ω, C 1 =10 pF and C 2 =10 nF were considered.…”

Analysis of a modular generator for high-voltage, high-frequency pulsed applications, using low voltage semiconductors (<1kV) and series connected step-up (1:10) transformers

“…New processes for food sterilization, 1 waste treatment, 2 pollution control, 3 medical use, 4 laser applications, 5 commercial semiconductor, and metal treatment are also being developed, 6,7 which require high-voltage pulses. To this growing use has contributed the increasing interest in pulsed power supplies based on solid-state switches due to the improved volt-ampere performance of these devices, as well as the new pulsed topologies brought from power electronics converters.…”