2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) 2017
DOI: 10.1109/memsys.2017.7863534
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A 1000-Volt planar micro-supercapacitor by direct-write laser engraving of polymers

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Cited by 5 publications
(8 citation statements)
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“…[95] Using the same design principle, Li et al successfully fabricated a 1000 V planar MSC by connecting five of the 200 V LIG-based MSCs in series. [26] The device is capable of powering an electrostatic cantilever microresonator for over 1 min. [26] The MSCs derived from LIG reaches a threshold that is limited by the electrochemical double layer and the graphene structure.…”
Section: Microsupercapacitorsmentioning
confidence: 99%
See 1 more Smart Citation
“…[95] Using the same design principle, Li et al successfully fabricated a 1000 V planar MSC by connecting five of the 200 V LIG-based MSCs in series. [26] The device is capable of powering an electrostatic cantilever microresonator for over 1 min. [26] The MSCs derived from LIG reaches a threshold that is limited by the electrochemical double layer and the graphene structure.…”
Section: Microsupercapacitorsmentioning
confidence: 99%
“…[15][16][17][18][19][20][21][22] Here, starting from the discovery of LIG, we will first emphasize strategies for the engineering of chemical, physical, and electronic properties of LIG; specifically, the regulation of laser parameters, atmosphere, and substrates to control the porosity, composition, and morphology of the LIG. The controllable synthesis of LIG and ease in property engineering makes it a versatile material in various applications including in sustainable energy conversions such as water splitting and fuel cell technology, [20,23] supercapacitors (SCs) for energy storage, [15,16,[24][25][26] sensors for sound, photon, strain, and chemicals detection, [27][28][29][30][31][32][33] and microfluidics [34][35][36] that are applicable to the laboratory and industrial scales, as outlined. Finally, the future advancement, such as the development of flexible electronics and biodegradable devices, will be discussed.…”
mentioning
confidence: 99%
“…In each PI film, both sides are converted into LIG and work as the capacitive materials. With this similar design principle, a 1000-V SC was demonstrated by Li et al All the MSCs demonstrate excellent cyclability and mechanical flexibility, which affords it great potential in the use of wearable electronics. ,,, For examples, the capacitances are over 95% retained after 10000 bending cycles at a α B of ∼90° (Figure f) …”
Section: Applications Of Ligmentioning
confidence: 99%
“…9−11 This innovative graphene exhibits high thermal stability (>900 °C), excellent con-ductivity (5−25 S/cm), and high surface area (∼340 m 2 /g), thus being a versatile material that can be easily reengineered morphologically and structurally by just modifying the laser parameters. 9,10 LIG presents excellent potential for synthesis at industrial scale with application already demonstrated in supercapacitors, 10,12,13 sensors and biosensors, 14−20 energy conversion, 21,22 microfluidics, 23,24 and antimicrobial electrodes. 25−27 Laser-assisted processing differs from other techniques concerning the formation of a 3D graphene structure.…”
Section: ■ Introductionmentioning
confidence: 99%
“…Laser-induced graphene is a 3D porous material prepared through photothermal transition with a pulsed infrared laser on carbon substrates in ambient conditions without using any solvents, thereby generating material with differentiated physical and chemical properties. This innovative graphene exhibits high thermal stability (>900 °C), excellent conductivity (5–25 S/cm), and high surface area (∼340 m 2 /g), thus being a versatile material that can be easily reengineered morphologically and structurally by just modifying the laser parameters. , LIG presents excellent potential for synthesis at industrial scale with application already demonstrated in supercapacitors, ,, sensors and biosensors, energy conversion, , microfluidics, , and antimicrobial electrodes. Laser-assisted processing differs from other techniques concerning the formation of a 3D graphene structure. Moreover, it enables the design of complex LIG geometries with high resolution and without the use of masks.…”
Section: Introductionmentioning
confidence: 99%