A 1mG-to-20G integrated MEMS inertial sensor

Yamane, Daisuke; Konishi, Toshifumi; Matsushima, Takaaki; Toshiyoshi, Hiroshi; Masu, Kazuya; Machida, Katsuyuki

doi:10.1109/icsens.2014.6985322

Cited by 2 publications

(2 citation statements)

References 6 publications

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“…From the measured values of the mechanical resonant frequency and the mechanical Q, BN was estimated to be below 1 G/Hz 1/2 , which was sufficiently below the target value of 10 G/Hz 1/2 [9,10]. We also confirmed that the sub-1G MEMS inertia sensor can function without mechanical failure after the input acceleration of up to 20 G [11], as shown in Fig. 3.…”

Section: High Sensitivity Inertia Sensor Using Gold Assupporting

confidence: 69%

Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease

Masu

Yamane

Machida

et al. 2016

ESSCIRC Conference 2016: 42nd European Solid-State Circuits Conference

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In this paper, we present our recent progress of a high sensitivity complementary metal-oxide semiconductormicroelectromechanical systems (CMOS-MEMS) inertia sensor and its application to early-stage diagnosis of Parkinson's disease. The feature of the CMOS-MEMS sensor is the use of gold proof mass. High density of gold enables us to increase sensitivity by reducing thermo-mechanical noise that is inversely proportional to proof mass. We then show the developed CMOS-MEMS multiphysics design environment. An equivalent circuit of a MEMS accelerometer has been designed to simultaneously understand both the mechanical and the electrical behaviors. One of the potential applications of the high sensitivity inertia sensor is also discussed by focusing on early-stage diagnosis of Parkinson's disease.

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Section: High Sensitivity Inertia Sensor Using Gold Assupporting

confidence: 69%

Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease

Masu

Yamane

Machida

et al. 2016

ESSCIRC Conference 2016: 42nd European Solid-State Circuits Conference

Self Cite

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“…As the magnitude of BN is inversely proportional to the mass of the movable structure [5], the increase of proof-mass density would be a promising approach to lower BN with a minimum proof-mass footprint. In this paper, we present a 1-mG MEMS sensor [6]. The target BN was set to be below 1 G/Hz 1/2 , which is one order of magnitude smaller than that of our previous work [7].…”

Section: Mems (Microelectromechanical Systems) Technologymentioning

confidence: 99%

(Invited) A 1-mG MEMS Sensor

Yamane

Konishi²,

Toshiyoshi

et al. 2016

ECS Trans.

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This paper presents a 1-mG MEMS (microelectromechanical systems) capacitive inertial sensor developed by multi-layer metal technology. The sensor is designed to detect acceleration below 1 mG. A proof-of-concept device is fabricated by using a post-CMOS gold electroplating process. Measurement results suggest that the actual Brownian noise (BN ) is estimated to be lower than the target BN of 1 μG/Hz1/2. Acceleration responses are also experimentally evaluated, which shows the potential of sensing acceleration below 1 mG. Those results reveal that the proposed sensor design could be a promising way to improve the sensitivity and the sensing range of integrated CMOS-MEMS accelerometers

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A 1mG-to-20G integrated MEMS inertial sensor

Cited by 2 publications

References 6 publications

Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease

Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease

(Invited) A 1-mG MEMS Sensor

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