A 22-ng/$\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques

Furubayashi, Yuki; Oshima, Takashi; Yamawaki, Taizo; Watanabe, K.; Mori, K.; Mori, Naoki; Matsumoto, Akira; Kamada, Y.; Isobe, Aki; Sekiguchi, Toshio

doi:10.1109/jssc.2020.2991533

Cited by 27 publications

(12 citation statements)

References 23 publications

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“…Among these sensing mechanisms, capacitive accelerometers have emerged as a research hotspot and have gained favor in the commercial industry [18][19][20]. The state-ofthe-art resolution of capacitive sensors is currently around 0.44 µg [21] according to the published literature. However, further improvements in the accuracy of capacitive sensors are challenging [21,22].…”

Section: Introductionmentioning

confidence: 99%

Top-Down Design Method of a Time Domain Accelerometer with Adjustable Resolution

Li,

Jian

2024

Micromachines

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A top-down design methodology and implementation of a time domain sensor is presented in this paper. The acceleration resolution of the time domain sensor is equal to the time-measurement accuracy divided by the sensor sensitivity. Combined with the sensitivity formula, the acceleration resolution is proportional to the vibration amplitude, the time-measurement accuracy, and the third power of the resonant frequency. According to the available time-measurement accuracy and the desired acceleration resolution, the parameters including the vibration amplitude and the resonant frequency were theoretically calculated. The geometrical configuration of the time domain sensor device was designed based on the calculated parameters. Then, the designed device was fabricated based on a standard silicon-on-insulator process and a matched interface circuit was developed for the fabricated device. Experimental results demonstrated that the design methodology is effective and feasible. Moreover, the implemented sensor works well. In addition, the acceleration resolution can be tuned by adjusting the time-measurement accuracy and the vibration amplitude. All the reported results of this work can be expanded to other time domain inertial sensors, e.g., a gyroscope or tilt sensor.

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Section: Introductionmentioning

confidence: 99%

Top-Down Design Method of a Time Domain Accelerometer with Adjustable Resolution

Li,

Jian

2024

Micromachines

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“…When the aspect ratio of the projectile increases and the projectile velocity is greater than 800 m/s, the stress wave propagates back and forth in the projectile body during the penetration process, resulting in concussive acceleration [ 15 ]. The peak value of the high-frequency concussive signal will increase rapidly and the overload envelope of multi-layer target penetration will be completely submerged, resulting in the mutual adhesion of overload signals from layer to layer, which cannot effectively identify the penetration layer [ 16 ].…”

Section: Introductionmentioning

confidence: 99%

Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection

Cui,

Chuai,

Huang

et al. 2023

Micromachines

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The problem that the fuze overload signal sticks and is not easily identified by the counting layer during the high-speed intrusion of the projectile is an important factor affecting the explosion of the projectile in the specified layer. A three-pole plate dual-capacitance acceleration sensor based on the capacitive sensor principle is constructed in this paper. The modal simulation of the sensor structure is carried out using COMSOL 6.1 simulation software, the structural parameters of the sensor are derived from the mechanical properties of the model, and finally the physical sensor is processed and fabricated using the derived structural parameters. The mechanical impact characteristics of the model under different overloads were investigated using ANSYS/LS-DYNA, and the numerical simulation of the projectile intrusion into the three-layer concrete slab was carried out using LS-DYNA. Under different overload conditions, the sensor was tested using the Machette’s hammer test and the output signal of the sensor was obtained. The output signal was analyzed. Finally, a sensor with self-powered output, high output voltage amplitude, and low spurious interference was obtained. The results show that the ceramic capacitive sensor has a reasonable structure, can reliably receive vibration signals, and has certain engineering applications in the intrusion meter layer.

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“…Besides the noises mentioned above, a new kind of noise has been reported in recent years. This noise originates from the interaction of the output bitstreams and MEMS high-order mechanical resonances in the electrostatic feedback force [ 20 , 21 ]. To evaluate this noise, the electromechanical model of the sensing element must include high-order natural modes.…”

Section: Introductionmentioning

confidence: 99%

Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma–Delta MEMS Capacitive Accelerometers

Wang

Zhang

2023

Sensors

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The high-order mechanical resonances of the sensing element in a high-vacuum environment can significantly degrade the noise and distortion performance of seismic-grade sigma–delta MEMS capacitive accelerometers. However, the current modeling approach is unable to evaluate the effects of high-order mechanical resonances. This study proposes a novel multiple-degree-of-freedom (MDOF) model to evaluate the noise and distortion induced by high-order mechanical resonances. Firstly, the MDOF dynamic equations of the sensing element are derived using the principle of modal superposition and Lagrange’s equations. Secondly, a fifth-order electromechanical sigma–delta system of the MEMS accelerometer is established in Simulink based on the dynamic equations of the sensing element. Then, the mechanism through which the high-order mechanical resonances degrade the noise and distortion performances is discovered by analyzing the simulated result. Finally, a noise and distortion suppression method is proposed based on the appropriate improvement in high-order natural frequency. The results show that the low-frequency noise drastically decreases from about −120.5 dB to −175.3 dB after the high-order natural frequency increases from about 130 kHz to 455 kHz. The harmonic distortion also reduces significantly.

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A 22-ng/$\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques

Cited by 27 publications

References 23 publications

Top-Down Design Method of a Time Domain Accelerometer with Adjustable Resolution

Top-Down Design Method of a Time Domain Accelerometer with Adjustable Resolution

Structural Design of MEMS Acceleration Sensor Based on PZT Plate Capacitance Detection

Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma–Delta MEMS Capacitive Accelerometers

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