2016
DOI: 10.1109/tns.2016.2582686
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A 2D Proof of Principle Towards a 3D Digital SiPM in HV CMOS With Low Output Capacitance

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Cited by 29 publications
(20 citation statements)
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“…We propose to use a 3D digital SiPM as a solution to all aforementioned problems ( Figure 1) [30][31][32][33]. In this approach, different silicon tiers dedicated to specific functions are stacked and routed using vertical interconnections.…”
Section: Introductionmentioning
confidence: 99%
“…We propose to use a 3D digital SiPM as a solution to all aforementioned problems ( Figure 1) [30][31][32][33]. In this approach, different silicon tiers dedicated to specific functions are stacked and routed using vertical interconnections.…”
Section: Introductionmentioning
confidence: 99%
“…The application of silicon technology to the development of low photon flux sensors—later known as silicon photomultipliers (SiPMs)—can be traced back to the late 1970s [ 1 ], when a space-distributed fine array of metal resistor semiconductor (MRS) micro-sensors was conceived with individual quenching and common output. Since then, the SiPM R&D is dominating the panorama of modern research in the field of low photon flux detectors, with the synergy and unique contribution of a large number of groups during the last 30 years [ 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 ]. Modern SiPMs are composed of an array of p/n-junctions (microcells) operated in Geiger mode, with individual passive quenching resistors, as reported in Figure 1 .…”
Section: Introductionmentioning
confidence: 99%
“…The avalanche pixel image sensors and the avalanche pixel tracking sensors use this technology for low photon flux and ionizing radiation, respectively [ 16 , 17 ]. The application of CMOS SPAD sensor solutions to digital SiPM was demonstrated among others in the 800 nm [ 10 ] and 350 nm [ 18 ].…”
Section: Introductionmentioning
confidence: 99%
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“…When performing single-photon counting with analog SiPMs, these fluctuations blur the spectrum at high photon counts. With a PDC, each triggered SPAD raises a flag processed by the digital logic [ 41 , 42 , 46 , 47 , 48 ]. Most variations in the SPAD’s response are thus masked by the digital conversion performed by the quenching circuit which therefore provides a greater SPAD-to-SPAD variation immunity.…”
Section: Analog Versus Digital Spad Arraymentioning
confidence: 99%