A 3-axis MEMS capacitive accelerometer free of cross axis sensitivity

Momen, Hadi Ghasemzadeh; Tavakoli, Hadi; Sani, Ebrahim Abbaspour

doi:10.1109/iraniancee.2016.7585757

Cited by 10 publications

(5 citation statements)

References 9 publications

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“…In accelerometer sensors, acceleration is usually given in g. In capacitive accelerators, sensitivity is defined as the ratio of the capacitor changes due to a 1-g acceleration, and thus (Momen et al 2016):…”

Section: Analysis Of Mems Accelerometermentioning

confidence: 99%

“…From Eq. 6, it is clear that the change of the capacitance is proportional to the mass deviation, which is due to the acceleration applied to the system under the assumption that the deviation is small (Momen et al 2016).…”

Section: Analysis Of Mems Accelerometermentioning

confidence: 99%

“…The changes of capacitor in accelerometers are caused by three motions: changes in the overlapping of surfaces, air distance, and dielectric overlapping (Momen et al 2016). The highest sensitivity is caused by the change of air distance.…”

Section: Designing Of Capacitive Planesmentioning

confidence: 99%

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A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

2020

Informacije MIDEM

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In this paper a three-axis capacitor accelerometer has been designed, analyzed and optimized using microelectromechanical systems technology. The accelerometers are generally divided into three categories of single axis, two axes, and three axes in terms of their ability to measure acceleration. In the suggested structure, acceleration measurements are carried out on all three axes simultaneously using a mass and spring system, which makes it possible to achieve a high sensitivity at a low occupancy level without losing other accelerator factors. By taking difference in this structure, it is shown that each axis acceleration has a very low impact on the measured acceleration of the other two axes. If any external factor changes the value of a single capacitor, the original output of the capacitor does not change for detecting acceleration. In other words, the acceleration of any of these three axes, due to its designing features, does not influence the other two axes and the system performance cannot be disrupted by external factors. The other important characteristics of the accelerometers are dynamic range, operating frequency and sensitivity. This study covers a dynamic range up to 1000g and an operating frequency up to 20 kHz. The accelerometer sensitivity is 4 fF/g in the z axis direction while it is 9 fF/g in the x and y axes directions. In this paper, the simulation of the structure is performed using Intellisuite software. Moreover, a multi-objective genetic optimization algorithm has been used to determine the dimensions of the constituents of the spring and the weight.

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Section: Analysis Of Mems Accelerometermentioning

confidence: 99%

Section: Analysis Of Mems Accelerometermentioning

confidence: 99%

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A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

2020

Informacije MIDEM

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“…This response depends on the physical parameters of the MEMS: proof mass, spring constant, damping factor, size, etc. [ 5 , 15 , 16 , 17 ]. Different MEMS will have a completely different mechanical response in terms of sensitivity, linear region or resonant frequency.…”

Section: Capacitance To Voltage Convertermentioning

confidence: 99%

Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers

Royo

Sánchez-Azqueta

Gimeno

et al. 2016

Sensors

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In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/Hz at 50 kHz, which corresponds to 100 μg/Hz.

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“…According to the detection principle, micro-accelerometers can be divided into piezoresistive [ 22 ], piezoelectric [ 23 ], resonant [ 24 ], capacitive [ 25 ], and other forms. Among them, capacitive accelerometers have the advantages of high accuracy [ 26 ], low-noise [ 27 ], low temperature sensitivity [ 28 ], low power consumption [ 29 ], and a simple structure [ 30 ]. Therefore, they gradually became mainstream in the development of micro-silicon acceleration sensors.…”

Section: Introductionmentioning

confidence: 99%

Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer

et al. 2021

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In this study, a comb-type capacitive accelerometer based on a silicon carbide (SiC) microstructure is presented and investigated by the finite element method (FEM). It has the advantages of low weight, small volume, and low cross-coupling. Compared with silicon(111) accelerometers with the same structure, it has a higher natural frequency. When the accelerometer vibrates, its resistive force consists of two main components: a viscous damping and an elastic damping force. It was found that viscous damping dominates at low frequency, and elastic damping dominates at high frequency. The second-order linear system of the accelerometer was analyzed in the time-frequency domain, and its dynamic characteristics were best when the gap between the capacitive plates was 1.23 μm. The range of this accelerometer was 0–100 g, which is 1.64 times that of a silicon(111) accelerometer with the same structure. In addition, the accelerometer could work normally at temperatures of up to 1200 °C, which is much higher than the working temperatures of silicon devices. Therefore, the proposed accelerometer showed superior performance compared to conventional silicon-based sensors for inertial measurements.

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A 3-axis MEMS capacitive accelerometer free of cross axis sensitivity

Cited by 10 publications

References 9 publications

A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers

Modeling and Analysis of a SiC Microstructure-Based Capacitive Micro-Accelerometer

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