A 33 × 25 µm² low-power range finder

Abstract

Within this paper a time-of-flight single-pixel range finding sensor is presented. The sensor is fabricated in a standard 180 nm 1P6M CMOS process, occupying a total active area of 33 × 25 µm², at a fill factor of ~ 55%. The pixel power consumption is reduced to 900 nW, facilitating the current domain ambient light (AL) suppression at the same time. Measurement results show a standard deviation of 7 mm at 1.2 m and below 5.2 cm for a range up to 3.2 m. The AL immunity is characterized up to 180 klx, demonstrating a distance deviation within 4 cm.