2018
DOI: 10.1007/s41315-018-0071-9
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A 3D-printed 3-DOF tripedal microrobotic platform for unconstrained and omnidirectional sample positioning

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Cited by 10 publications
(6 citation statements)
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“…Morita et al proposed a 3‐DOF parallel XYθ z link mechanism based on the impact actuation principle, [ 175 ] which achieved linear motions along X / Y axis and rotary motion around Z axis; the positioning error was 18.6 μm in the point‐positioning test and the deviations of the position and rotary angle were −5.34 μm and −50 mdeg, respectively. A 3‐DOF XYθ z tripedal microrobotic platform with unlimited stroke and sub‐micrometer accuracy was designed, [ 176 ] which achieved unconstrained and omnidirectional sample positioning; the platform achieved strokes of 3 mm × 3 mm × 20°. Fuchiwaki et al [ 177 ] developed a compact 3‐DOF inchworm mechanism with low‐inertia characteristic for omnidirectional precise positioning, which consisted of four piezoelectric actuators and a pair of electromagnets.…”
Section: Multi‐dof Piezoelectric Actuationmentioning
confidence: 99%
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“…Morita et al proposed a 3‐DOF parallel XYθ z link mechanism based on the impact actuation principle, [ 175 ] which achieved linear motions along X / Y axis and rotary motion around Z axis; the positioning error was 18.6 μm in the point‐positioning test and the deviations of the position and rotary angle were −5.34 μm and −50 mdeg, respectively. A 3‐DOF XYθ z tripedal microrobotic platform with unlimited stroke and sub‐micrometer accuracy was designed, [ 176 ] which achieved unconstrained and omnidirectional sample positioning; the platform achieved strokes of 3 mm × 3 mm × 20°. Fuchiwaki et al [ 177 ] developed a compact 3‐DOF inchworm mechanism with low‐inertia characteristic for omnidirectional precise positioning, which consisted of four piezoelectric actuators and a pair of electromagnets.…”
Section: Multi‐dof Piezoelectric Actuationmentioning
confidence: 99%
“…Copyright 1995, Elsevier. h) The inertial-actuated XYθ z stage by Adibnazari et al Reproduced with permission [176]. Copyright 2018, Springer.…”
mentioning
confidence: 99%
“…[194][195][196] As shown in Figure 9a, the inertial impact type MPRs usually have three parts, including robot base, piezoelectric unit, and inertial unit. Sawtooth signals are generally utilized to realize the inertial movements, and there are usually two sub-steps in the movements: 1) in t 1 to t 2 , the piezoelectric unit slowly deforms to push the inertial unit forward, the generated inertial force is smaller than the static friction between the robot base and the ground, and the robot base remains stationary; 2) in t 1 to t 2 , the piezoelectric unit rapidly deforms and makes the piezoelectric unit move backward, the generated inertial force is much larger than that in sub-step 1) because of the fast response; and the robot base will move forward when the inertial force generated by the inertial unit is greater than the friction force between the robot base and the ground; and the continuous movements can be achieved by repeating these sub-steps [197,198] Zhong et al [199] proposed a cubic centimeter MPR using the inertial impact method, as shown in Figure 9b, only the forward movement was realized by using one piezoelectric stack. Then, Zhong et al [200] designed a bipedal inertial impact type MPR illustrated in Figure 9c to improve the freedom of the robot motion, two piezoelectric stacks were used to actuate the two driving feet, respectively, the forward and steering motions were achieved.…”
Section: The Inertial Driving Type Mprsmentioning
confidence: 99%
“…Bergander et al (2004) designed an FHMs-PSSA integrated with atomic force microscope probes; it could realize the movement of three degrees of freedom in one plane by controlling the electrical signals of the four piezoelectric rods; besides, the FHMs-PSSA could be accurately located and applied to accurate measurement by using the information obtained from the atomic force microscope probe as well. Adibnazari et al (2018) developed a three-degree-of-freedom FHMs-PSSA using 3D printing technology, which achieved sub-micrometer precision; the good output characteristics of the platform showed the feasibility of creating functional 3D printing, see Figure 8(c). To expand the SEM micromanipulation system, the hemispherical precision operating platform designed by Shiratori et al (2012) is presented in Figure 8(d), which could be rotated in any direction including u X , u Y , and u Z through the coordinated actuation of multiple drive units.…”
Section: Multi-directional Coupling Type Multi-degree-of-freedommentioning
confidence: 99%
“…Unidirectional coupling type multi-DOF FHMs-PSSA: (a) nanomanipulation system for handling nanowires by Zhang et al (2013) and (b) multi-DOF FHMs-PSSA by Tian et al (2019). Multi-directional coupling type multi-DOF FHMs-PSSA: (c) multi-DOF FHMs-PSSA by Adibnazari et al (2018); and (d) multi-DOF FHMs-PSSA by Shiratori et al (2012).…”
Section: Progress In Structural Design Of Fhms-pssasmentioning
confidence: 99%