A 3D-printed bistable electromagnetic microlens actuator

Abstract

We present a monolithically 3D nanoprinted micro-optomechanical switch with electromagnetic actuation. The bistable actuator moves a microlens between two distinct positions along the optical axis, thereby shifting the image plane and attaining different numerical apertures. The sub-millimeter-size device achieves an average displacement of 163.9 µm between the two stable positions, with positioning and orientation errors below 3 µm and 0.5 degrees, respectively. An electromagnetic actuation system consisting of a polymer magnet and an external coil allows for rapid switching. We characterized the resonance behavior of the microlens actuator and demonstrated its capability for both DC and AC driving between stable positions.