“…Accordingly, recent progress has been focused on the design of cryo-CMOS integrated circuits and transceivers to realize the qubit manipulation, conversion, and error correction [5]- [7]. In this context, although earlier work managed to explore the cryogenic DC transfer characteristics of MOSFETs and evaluate the variation of temperature-related parameters with statistical analysis [8], the lack of a reliable cryo-CMOS compact model, which can cover the operations of superconductor/silicon-based qubits in the radiofrequency (RF) band (typically 2 -20 GHz), has restricted current cryogenic RF circuit designs only rely on insufficient experimental data of limited devices at a certain temperature point (4.2 K) [9]- [11]. Therefore, in order to implement large-scale integrated circuits suitable for full-fledged quantum computing applications, it is of great importance to characterize the RF performance of transistors with varied gate geometries and setup a generic cryo-CMOS RF compact model valid over the entire temperature and frequency ranges.…”