In this paper a MEMS based parallel plate dual gap varactor is presented to be integrated with -G m LC voltage controlled oscillated that is implemented with AMS 0.35µm-SiGe BiCMOS process that includes high-speed SiGe Heterojunction Bipolar Transistors (HBTs). Varactor and VCO is integrated on FR4 substrate using using wire bonding. Design and realization of MEM varactor is explained in Section II, VCO design is described in Section III and the integration and measurement results are given in Section IV.