A 4 mm2 Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration

Miao, Tongqiao; Xiao, Dingbang; Li, Qingsong; Hou, Zhanqiang; Wu, Xuezhong

doi:10.3390/s17102264

Cited by 9 publications

(6 citation statements)

References 35 publications

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“…Inertial sensors are generally used to detect and measure acceleration, tilt, and vibration. In principle, the MEMS-based accelerometer works to measure the displacement of a mechanical mass, known as a proof mass [139,140]. In MEMS devices, displacement detection is electrically measured through the capacitance between proof mass and electrode.…”

Section: Inertial Sensingmentioning

confidence: 99%

Opto-Mechanical Photonic Crystal Cavities for Sensing Application

et al. 2020

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A new class of hybrid systems that couple optical and mechanical nanoscale devices is under development. According to their interaction concepts, two groups of opto-mechanical systems are summarized as mechanically tunable and radiation pressure-driven optical resonators. On account of their high-quality factors and small mode volumes as well as good on-chip integrability with waveguides/circuits, photonic crystal (PhC) cavities have attracted great attention in sensing applications. Benefitting from the opto-mechanical interaction, a PhC cavity integrated opto-mechanical system provides an attractive platform for ultrasensitive sensors to detect displacement, mass, force, and acceleration. In this review, we introduce basic physical concepts of opto-mechanical PhC system and describe typical experimental systems for sensing applications. Opto-mechanical interaction-based PhC cavities offer unprecedented opportunities to develop lab-on-a-chip devices and witness a promising prospect to further manipulate light propagation in the nanophotonics.

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Section: Inertial Sensingmentioning

confidence: 99%

Opto-Mechanical Photonic Crystal Cavities for Sensing Application

et al. 2020

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“…And the level of structural sensitivity indicates the pros and cons of the design, the focus of this paper is to optimize the sensitivity of the piezoresistive acceleration sensor. There are many typical structures, such as single beam structure, double beam structure [36] and so on. This paper adopts four beams structure, that is, the entire sensor (mass block and four cantilever beams) are etched from single crystal silicon as Fig.…”

Section: A Piezoresistive Acceleration Sensormentioning

confidence: 99%

The Sensitivity Design of Piezoresistive Acceleration Sensor in Industrial IoT

Dong¹,

Ye²,

Liu³

et al. 2019

IEEE Access

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Piezoresistive acceleration sensors are widely used in various fields of the industrial Internet of Things because of their lightweight, fast response, and small size. The structural sensitivity of the sensor affects the accuracy of the measurement. And the sensitivity that the traditional method designs are only a feasible solution, not an optimal solution. Due to the differences in factory processes, the optimization of structural sensitivity is an NP-hard problem. To solve the design problem of structural sensitivity, we adopt the swarm intelligence algorithm in this paper, and we design a model for the structural sensitivity of the piezoresistive acceleration sensor. In addition, an improved grasshopper optimization algorithm (CC-GOA) that combines chaos strategy and Cauchy mutation is proposed to optimize the structural sensitivity of the piezoresistive acceleration sensor, and the structure of the sensor is composed of four beams and mass block. The experiments are compared with six well-known algorithms on 16 benchmark functions to verify the algorithm performance of CC-GOA, and then, the structural sensitivity of the piezoresistive acceleration sensor is optimized by CC-GOA. The results indicate that the piezoresistive acceleration sensor is designed with high sensitivity and superiority.

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“…Combining shape factor k 0 (19) of the cross-section area illustrated in Fig. 2(c), equivalent diameter d p (10), and tortuosity fitting model ( 15), the permeability model presented by (3) would be modified.…”

Section: Tortuosity Predicting Model Based On Representative Elementary Volume (Rev) and Psd Of Porous Transducermentioning

confidence: 99%

“…Main parameters of transducers with 4 different PSDs are listed in Table 2. Specifically, the equivalent diameter is obtained by (10), and the skewness is calculated by (13). Porous transducer and its microstructure are illustrated in Fig.…”

Section: B Porous Transducer Productionmentioning

confidence: 99%

Permeability Model for Porous Transducer With Glass Spheres Packing

Wang

Cheng

2019

IEEE Access

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A theoretical model is developed for predicting permeability of a porous transducer, which is a crucial component of liquid circular angular accelerometer and sintered by glass microspheres. The proposed permeability model of the transducer is determined with consideration of its shape factor, tortuosity, and particle size distribution (PSD) characterized by equivalent mean diameter and skewness. A novel analytical method for calculating the shape factor for the arbitrary cross-section area is derived. In addition, a tortuosity model is designed by fitting skewness and tortuosity of particle packing beds in a regular tetrahedron microspheres arrangement structure. Together with the analytical model of shape factor, the tortuosity fitting model and a method to determine equivalent diameter from PSD, the permeability model is implemented to compare with Kozeny-Carman (KC) model. The experiments are performed to measure the permeability of four types of porous transducers fabricated with different PSDs and consequently validate the permeability model. The results indicate that the proposed model can be utilized for predicting permeability of porous transducer with higher precision.

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A 4 mm2 Double Differential Torsional MEMS Accelerometer Based on a Double-Beam Configuration

Cited by 9 publications

References 35 publications

Opto-Mechanical Photonic Crystal Cavities for Sensing Application

Opto-Mechanical Photonic Crystal Cavities for Sensing Application

The Sensitivity Design of Piezoresistive Acceleration Sensor in Industrial IoT

Permeability Model for Porous Transducer With Glass Spheres Packing

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