A 60‐GHz GaAs micromachined slow‐wave bandpass filter using a microstrip stepped‐impedance hairpin resonator

Abstract

In this paper, a new microstrip stepped‐impedance hairpin resonator (SIHR) slow‐wave bandpass filter (BPF) using a dielectric‐supported air‐gapped microstrip line (DAML) via surface micromachining on GaAs substrate is proposed. The slow‐wave periodic structures utilize the parallel‐ and series‐resonance characteristics of the resonators to construct a band‐pass filter. The proposed slow‐wave band‐pass filter is designed to produce a passband of 10% at the fundamental frequency of 60 GHz. It exhibits insertion loss of 2.23 dB, return loss of better than 15 dB, and a stopband greater than 35 dB. This filter is useful for many millimeter‐wave system applications. © 2005 Wiley Periodicals, Inc. Microwave Opt Technol Lett 47: 86–89, 2005; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.21089