A power-efficient 16-bit 1-MS/s successive approximation register (SAR) analog-to-digital converter (ADC) is presented in this paper. High-bit sampling makes the bridge capacitance in the digital-to-analog converter (DAC) a unit one, eliminating fractional capacitance mismatch. The high-precision comparator is composed of a four-stage preamplifier and a strong-arm latch, with auto-zeroing used to mitigate input offset further. Digital foreground calibration based on low-bit weight is implemented to correct DAC capacitance mismatch. The post-layout simulation results show that the core ADC achieves 95.61 dB SNDR and 105.1 dB SFDR with calibration, consuming 5.4 mW power under a 3.3 V supply voltage, corresponding to a Schreier figure of merit (FoM) of 175.3 dB. The ADC core area is 1.06 mm2 in the 180 nm CMOS technology.