2015
DOI: 10.1088/0960-1317/25/2/025010
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A basic experimental study of ultrasonic assisted hot embossing process for rapid fabrication of microlens arrays

Abstract: This paper reports a highly effective technique for rapid fabrication of microlens arrays based on an ultrasonic assisted hot embossing process. In this method, a thin stainless steel mold with micro-holes array is fabricated by a photolithography and wet etching process. Then, the thin stainless steel mold with micro-holes array is placed on top of a plastic substrate (PMMA plate) and the stack is placed in an ultrasonic vibration embossing machine. During ultrasonic assisted hot embossing operation, the surf… Show more

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Cited by 32 publications
(15 citation statements)
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“…The shaping of the materials can take place via various processes, such as compression molding, injection molding, shape extrusion (such as tubes), film extrusion (cast or blown), 3D printing, and various coating processes. Cast film extrusion is an industrial method offering the possibility of continuous production of self-standing films [ 13 , 14 , 15 ]. During the cast film extrusion, the polymer melt exiting a single-screw extruder through a slit die is stretched in air and cooled on a smooth metallic surface of a thermoregulated chill-roll.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…The shaping of the materials can take place via various processes, such as compression molding, injection molding, shape extrusion (such as tubes), film extrusion (cast or blown), 3D printing, and various coating processes. Cast film extrusion is an industrial method offering the possibility of continuous production of self-standing films [ 13 , 14 , 15 ]. During the cast film extrusion, the polymer melt exiting a single-screw extruder through a slit die is stretched in air and cooled on a smooth metallic surface of a thermoregulated chill-roll.…”
Section: Introductionmentioning
confidence: 99%
“…As the main processing parameters, the roll temperature, the take-off velocity, and the cooling during taking-off influence the final microstructure already of unfilled polymers. There are only a few scientific publications [ 13 , 14 , 15 ] that deal with influencing factors during the melt-shaping of polymer films, e.g., for polycarbonate [ 13 ] and polypropylene [ 14 ]. For composites containing CNTs, the phenomenon of a strong alignment of CNTs in the extrusion direction was discussed on the example of blow-molded high-density polyethylene/multiwalled carbon nanotube films, which resulted in enhanced mechanical properties in this direction [ 16 ].…”
Section: Introductionmentioning
confidence: 99%
“…The micro-lens array (MLA), called a Fly-eye lens, is widely used in optical communication, lighting displays, optical sensors, and illumination because of its unique structures and function. There are many methods that can fabricate micro-lenses, including plasma etching [1], laser ablation [2], micro-milling [3], photolithography [4], micro-injection [5], glass reflow [6] and micro hot embossing [7][8][9][10][11][12]. Wherein, micro hot embossing is regarded as one of the most promising processes for mass production.…”
Section: Introductionmentioning
confidence: 99%
“…1 Reductions in cycle time were reported for ultrasonic hot embossing of microstructures. [2][3][4][5] High-frequency induction heating was demonstrated to be effective in productivity enhancement in hot embossing. 6 However, either signicant modications in tool materials are necessary to full the IR-transparent requirement, or special implementations must be made in the embossing facility for ultrasonic or induction heating embossing.…”
Section: Introductionmentioning
confidence: 99%