A batch-processed vacuum-sealed capacitive pressure sensor

Chavan, A.V.; Wise, K.D.

doi:10.1109/sensor.1997.635737

Cited by 33 publications

(20 citation statements)

References 9 publications

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“…Some of MEMS sensors need a vacuum environment to isolate heat transfer, such as infrared detectors or bolo-meters [8][9][10]. The widely used absolute pressure sensors in MEMS need a vacuum cavity as a zero pressure reference [11,12]. High vacuum level can dramatically enhance the performance of these devices, but MEMS vacuum packaging faces great challenge because of its small volume, any leak or degassing will corrupt the vacuum in the device lifetime.…”

Section: Introductionmentioning

confidence: 99%

Getter free vacuum packaging for MEMS

Gan

Huang

Wang

et al. 2009

Sensors and Actuators A: Physical

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Section: Introductionmentioning

confidence: 99%

Getter free vacuum packaging for MEMS

Gan

Huang

Wang

et al. 2009

Sensors and Actuators A: Physical

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“…Since the IEPG outer shell is a very good elastic and pressure-sensitive element, it can be used as the pressure measuring component of CPS. (6,7) In the form of the coaxial cylinder, CPS's two electrodes consist of the outer shell, as a grounded, elastically vibrating cathode under the explosive pressure, and the circuit tube, as a stationary anode. The CPS structure is shown in Fig.…”

Section: Cps Structure and Principlementioning

confidence: 99%

Measuring Chamber Pressures of Different Caliber Artilleries Using a Capacitive Pressure Sensor

2011

Sensors and Materials

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In order to measure the chamber pressures of different caliber artilleries, a novel capacitive pressure sensor with an elastic pressure-sensitive element is presented in this paper. It uses a circuit cylinder as its stationary anode and the internal electronic piezo gauge shell as its moveable cathode with an electrode distance of 0.5 mm, and constructs a coaxial cylinder capacitor converter. The device principle and structure are given and the device mechanical and thermal characteristics are theoretically simulated using the finite element software ANSYS. Various physical properties were experimentally tested. Results show that the device possesses a very good temperature stability and its capacitance shows an approximately linear relationship with the subjected pressure. It has a sensitivity of 0.00753 Pf/MPa, and a pressure measurement range of 0-600 MPa, and can withstand an instantaneous high temperature of 3,000°C. By using the sensor shell as the device elastic sensitive element, its volume is reduced and its applications are extended; therefore, it can be used to measure the chamber pressures of various different caliber guns. In addition, its lower cost is helpful in promoting wide applications.

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“…The targeted resolution of 25 mtorr here is equivalent to about one foot of altitude shift at sea level and represents 15 b. To achieve wide dynamic range and high resolution simultaneously, a multitransducer vacuum-sealed capacitive pressure sensor has been developed [42], [43]. This device uses multiple diaphragms to segment the overall pressure range, as shown in Fig.…”

Section: Barometric Pressure Sensormentioning

confidence: 99%

“…7. The bossed diaphragm diameters vary from 920 to 1100 m at a thickness of 2.4 m and a gap separation of 9.8 m. The sensor is fabricated using bulk micromachining and a silicon-glass dissolved-wafer process [43]. To measure barometric pres- sure, the microcontroller first reads out the smallest of the diaphragms, which serves as a global sensor spanning the entire measurement range at relatively low resolution.…”

Section: Barometric Pressure Sensormentioning

confidence: 99%

A generic multielement microsystem for portable wireless applications

et al. 1998

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An open-architecture microsystem that can be populated with a variety of sensors and actuators is described. The microsystem is designed for low-power wireless applications where small size and high sensor accuracy are important. It consists of an in-module microcontroller connected to multiple front-end transducers through an intramodule sensor bus. An external interface allows internally processed data to be output through either a hard-wired input/output port or a radio-frequency transmitter. The present microsystem is configured for environmental monitoring and measures temperature, barometric pressure, relative humidity, and acceleration/vibration. It occupies less than 10 cc, consumes an average of 530 W from 6 V, and transmits data up to 50 m.System features such as active power management, the intramodule sensor bus, generic bus interface circuitry, and in-module sensor compensation based on bivariate polynomials are discussed.

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A batch-processed vacuum-sealed capacitive pressure sensor

Cited by 33 publications

References 9 publications

Getter free vacuum packaging for MEMS

Getter free vacuum packaging for MEMS

Measuring Chamber Pressures of Different Caliber Artilleries Using a Capacitive Pressure Sensor

A generic multielement microsystem for portable wireless applications

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