A biaxial piezoelectric MEMS scanning mirror and its application to pico-projectors

Ikegami, Keiichi; Koyama, Takaaki; Saito, Takao; Yasuda, Yoshiaki; Toshiyoshi, Hiroshi

doi:10.1109/omn.2014.6924610

Cited by 20 publications

(15 citation statements)

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“…4. The first mechanical resonance at f r1 is observed at 327.5 Hz as predicted by the model in (2). The low frequency drop is attributed to the slow thermal response of the device as modeled in (1).…”

Section: Frequency Response Measurementmentioning

confidence: 81%

Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers

Han

Wang

Zhang

et al. 2016

J. Microelectromech. Syst.

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A microelectromechanical systems (MEMS) mirror with large vertical displacement has been developed for Fourier transform microspectrometers, but there exists a large tilting during the large-stroke scanning of the MEMS mirror, which greatly compromises the usable range. In this paper, a closed-loop control method has been established to minimize the tilting of the MEMS mirror. According to experimental results, the tilting motion of the mirror plate can be modeled as a fourth-order system. A feedback controller consisting of a phase-lag compensator, a low-pass filter and a notch filter utilized to stabilize the closed-loop tilt system. A gain scheduling approach is also used to compensate the bias-dependent loop gain and thereby provide more consistent tilting rejection over a wide scan range. Compared with the open-loop drive approach, the closed-loop system offers a stable scan operation with much faster dynamic response and improved overall robustness. The experiments show that the residual tilting is reduced to below ±0.0015°during the full range scan of the MEMS mirror. With this control method, the MEMS mirror achieved a stable scan range up to 356.4 µm, so the measured spectral resolution reached 28 nm at 532 nm in a microspectrometer. The mirror tilting can be reduced dramatically by the proposed active control scheme, and thereby, the usable vertical scan range is increased significantly.[2016-0061]

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Section: Frequency Response Measurementmentioning

confidence: 81%

Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers

Han

Wang

Zhang

et al. 2016

J. Microelectromech. Syst.

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“…Spatial manipulation of laser beams is most commonly performed externally to the lasers [1]. The rapid scan speed and dynamic focal length potential of scanning MOEMS mirrors (also called scanning micromirrors or microscanners), combined with the small device footprint, have been exploited in many applications including pico-projectors [2], barcode readers [3] and biomedical imaging systems [4]- [6]. As an internal laser component, an adaptive optics mirror enabled by an array of micromachined actuators was reported to compensate for thermal lensing effects in a Nd:YVO 4 Raman laser [7].…”

Section: Introductionmentioning

confidence: 99%

Tunable Yb:KGW Laser, CW or Q-Switched, Enabled by Dual-Axis Tilt of an MOEMS Mirror

Paterson

Bauer

Lubeigt

et al. 2018

IEEE J. Select. Topics Quantum Electron.

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The experimental proof-of-concept demonstration of an end-pumped Yb:KGW laser with tunable spectral and temporal output characteristics is reported. For the first time, tuning of both of these characteristics in a solid-state laser is achieved simultaneously using a single electrothermally actuated micro-opto-electromechanical systems (MOEMS) micromirror with controllable tilt angle in two dimensions. In a continuous-wave mode, a wavelength tuning range of 22 nm with <0.3 nm linewidth was achieved by using static MOEMS mirror tilt about one axis to select the intracavity wavelength dispersed by a prism. A wavelength tuning range of 15.3 nm with <1.1 nm linewidth was achieved in Q-switched operation, by using simultaneous static tilt and resonant scanning of the MOEMS mirror about orthogonal axes. In this operational mode, a pulse repetition rate of 2.06 kHz was obtained with pulse durations varying from 460 to 740 ns over the addressable range of laser wavelengths.

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“…To use the best performance of the PZT (Lead Zirconate Titanate) process, we have recently developed a new scheme to use the PZT film for piezoelectric drive as well as for piezoelectric sensing for the feed-back control of the scanner; the actuators and the sensors are made in the identical process, and the process scheme has not been modified from the previous reports of ours [5,6] but the layout of the electrodes in the photomasks. The developed sensor system is used to control the fast horizontal axis of the scanner for the sake of the stabilization of projected images [7].…”

Section: Introductionmentioning

confidence: 99%

A biaxial PZT optical scanner for pico-projector applications

et al. 2015

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We report a newly developed two-dimensional MEMS optical scanner based on the ADRIP (Arc Discharge Reactive Ion-Plating) deposited piezoelectric PZT film of typical 4 µm. A circular mirror of 1.2 mm in diameter is suspended within a pair of resonant mechanism that oscillates at 25 kHz for ±12° mechanical angle with a typical voltage of 10 V. A gimbal plate including the mirror is supported with another pair of meandering suspensions to tilt the plate in the orthogonal direction at 60 Hz for the off-resonant vertical motion of ±8° mechanical. Overall power consumption of the piezoelectric actuation was 100 mW or less. As a mechanical reinforce, a rib-structure was designed on the backside of the mirror by using a structural optimization tool TOSCA to suppress the dynamic curvature to 100 nm or less. A piezoelectric sensor was also integrated in the identical PZT film after optimizing the electrode shape to pick up the mechanical angle of the scanner and to give a trigger signal to the control system. A plug-in type pico-projector optics and electronics has been assembled in a 7.5 cm × 12 cm × 5 cm volume with RGB lasers to demonstrate a HD (high definition) class image projection of 720 horizontal lines. The fundamental resonance of the entire scanner mechanism was made to be 1 kHz or higher, thereby exhibiting a compatibility with vehicle applications.

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A biaxial piezoelectric MEMS scanning mirror and its application to pico-projectors

Cited by 20 publications

References 0 publications

Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers

Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers

Tunable Yb:KGW Laser, CW or Q-Switched, Enabled by Dual-Axis Tilt of an MOEMS Mirror

A biaxial PZT optical scanner for pico-projector applications

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