A bidirectional scanning method for scanning transmission X-ray microscopy

Abstract

Scanning mode is a key factor for the comprehensive performance, including imaging efficiency, of scanning transmission X-ray microscopy (STXM). Herein is presented a bidirectional scanning method designed for STXM with an S-shaped moving track. In this method, artificially designed ramp waves are generated by a piezo-stage controller to control the two-dimensional scanning of the sample. The sample position information is measured using laser interferometric sensors and sent to a field-programmable gate array (FPGA) board which also acquires the X-ray signals simultaneously from the detector. Since the data recorded by the FPGA contain the real position of each scanned point, the influence of the backlash caused by the back-turning movement on the STXM image can be eliminated. By employing an adapted post-processing program, a re-meshed high-resolution STXM image can be obtained. This S-track bidirectional scanning method in fly-scan mode has been implemented on the STXM endstation at the Shanghai Synchrotron Radiation Facility (SSRF), and successfully resolved the ∼30 nm interval between the innermost strips of a Siemens star. This work removes the limitation on bidirectional scanning caused by motor backlash and vibration, and significantly improves the efficiency of STXM experiments.