A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer

Schöning, Michael J.; Simonis, Anette; Ruge, Christian A.; Ecken, Holger; Müller-Veggian, M.; Lüth, H.

doi:10.3390/s20100011

Cited by 39 publications

(14 citation statements)

References 13 publications

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“…The Al rear contact has been prepared by means of electron beam evaporation. All experimental details of the fabrication of the EIS structures are given elsewhere [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

A capacitive field-effect sensor for the direct determination of organophosphorus pesticides

Schöning

Arzdorf

Mulchandani

et al. 2003

Sensors and Actuators B: Chemical

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“…The Al rear contact has been prepared by means of electron beam evaporation. All experimental details of the fabrication of the EIS structures are given elsewhere [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

A capacitive field-effect sensor for the direct determination of organophosphorus pesticides

Schöning

Arzdorf

Mulchandani

et al. 2003

Sensors and Actuators B: Chemical

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“…Furthermore, the extracted pH voltage linearity for the oxygen-plasma-treated CNTFs is 0.9996 which is significantly better than 0.9810 for the as-sprayed ones. Based on the Nernst equation [25], the theoretical value of voltage sensitivity for the pH sensing is about 59.1 mV/pH. In other words, our experimental results of 55.7 mV/pH for the oxygen-plasmatreated CNTFs present a much better response with respect to the as-sprayed CNTFs.…”

Section: Resultsmentioning

confidence: 51%

Functionalized Carbon Nanotube Thin Films as the pH Sensing Membranes of Extended-Gate Field-Effect Transistors on the Flexible Substrates

Tsai

Huang

Wang

et al. 2014

IEEE Trans. Nanotechnology

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The oxygen-plasma-functionalized carbon nanotube thin films on the flexible substrates as the pH sensing membranes of extended-gate field-effect transistors are proposed for the first time. The carbon nanotubes are ultrasonically sprayed onto the polyimide substrates followed by an oxygen-plasma functionalization. Such oxygen-plasma-treated carbon nanotube thin films (CNTFs) exhibit superior pH sensing characteristics with the sensitivity of 55.7 mV/pH and voltage linearity of 0.9996 in a wide sensing range of pH 1-13. Moreover, the excellent flexibility of carbon nanotube is also demonstrated and the oxygen-plasma-treated CNTFs still maintain the sensitivity of 53.6 mV/pH and voltage linearity of 0.9943 even after five-cycle bending test. These results reveal that the oxygen-plasma-treated CNTFs have great potentials in the practically disposal and wearable biosensor applications.Index Terms-Biosensors, carbon nanotube (CNT), extendedgate field-effect transistors (EGFETs), flexible substrates.

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“…Based on the model, the threshold voltage V T(EGFET) of pH-EGFET sensors could be expressed in the following equation [10], [11] …”

Section: Resultsmentioning

confidence: 99%

Oxygen Plasma Functionalized Multiwalled Carbon Nanotube Thin Film as A pH Sensing Membrane of Extended-Gate Field-Effect Transistor

Tsai

Huang

Yang

et al. 2013

IEEE Electron Device Lett.

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Abstract-High-performance pH sening membranes of extended-gate field-effect transistors (EGFETs) composed only of oxygen-plasma-functionalized carbon nanotube thin films (CNTFs) are demonstrated. A large number of oxygen-containing functional groups are decorated on the sidewalls of carbon nanotubes (CNTs) after the oxygen plasma treatment. These functional groups act as the sensing sites and accurately respond to the ions of interest in different pH levels. Therefore, these functionalized CNTFs as the pH-EGFET sensing membranes can achieve a high voltage sensitivity of 56.8 mV/pH, a large voltage linearity of 0.9995, and a wide sensing range of pH 1-13. In addition, the oxygen-plasma-functionalized CNTFs also exhibit superior reliability with a small hysteresis voltage of 4.98 mV.Index Terms-Carbon nanotube thin film (CNTF), extendedgate field-effect transistor (EGFET), sensor.

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A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer

Cited by 39 publications

References 13 publications

A capacitive field-effect sensor for the direct determination of organophosphorus pesticides

A capacitive field-effect sensor for the direct determination of organophosphorus pesticides

Functionalized Carbon Nanotube Thin Films as the pH Sensing Membranes of Extended-Gate Field-Effect Transistors on the Flexible Substrates

Oxygen Plasma Functionalized Multiwalled Carbon Nanotube Thin Film as A pH Sensing Membrane of Extended-Gate Field-Effect Transistor

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