2021
DOI: 10.1109/access.2021.3058148
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A Bionic MEMS Electronic Stethoscope With Double-Sided Diaphragm Packaging

Abstract: In this paper, an electronic stethoscope is designed based on a bionic Micro-Electro-Mechanical System (MEMS) sound-sensitive sensor. Inspired by the strong sound reflection effect of the water-air interface, a double-sided diaphragm MEMS electronic stethoscope (DMES) encapsulated by a novel double-sided diaphragm packaging is proposed. The double-sided diaphragm packaging's superiority is verified by comparing a single diaphragm MEMS electronic stethoscope (SMES) with DMES. The frequency of the clinical heart… Show more

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Cited by 12 publications
(9 citation statements)
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References 23 publications
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“…Cilium & |Sphere [25,33] 23.0 132.0 15.1 Liquid-solid Cilium [33] 14.5 124.0 18.6 Liquid-solid Globule/Lollipop [33,34] 34.0 657.0 25.7 Liquid-solid Bat [33,35] 19.0 541.0 29.1 Liquid-solid frequency band below 20 Hz is relatively affluent. By contrast, the energy spectrum of other frequency bands is minimal, indicating that the heart band signal is effectively picked up.…”
Section: Results and Testmentioning
confidence: 99%
“…Cilium & |Sphere [25,33] 23.0 132.0 15.1 Liquid-solid Cilium [33] 14.5 124.0 18.6 Liquid-solid Globule/Lollipop [33,34] 34.0 657.0 25.7 Liquid-solid Bat [33,35] 19.0 541.0 29.1 Liquid-solid frequency band below 20 Hz is relatively affluent. By contrast, the energy spectrum of other frequency bands is minimal, indicating that the heart band signal is effectively picked up.…”
Section: Results and Testmentioning
confidence: 99%
“…The presence of two diaphragms and the intervening air path results in excessive ambient noise from the microphone and inefficient sound energy transmission [76] . In 2021, Duan et al [77] proposed a lollipop-shaped bionic pickup cavity, simulating the operating principle of the neuromast organ of a fish, which is highly sensitive in the low-frequency band.…”
Section: Ecg Sensingmentioning
confidence: 99%
“…where E is the modulus of elasticity; I is the second moment; F is the inner axial force of the resonator; ρ is the density of the resonator material; S is the cross-sectional area of the resonator; C a is the gas damping factor: C a � ηb 3 /(d 0 − y) 3 (η is the dynamic viscosity of the gas).…”
Section: Nonlinear Dynamics Equation Of Amentioning
confidence: 99%
“…Microelectromechanical systems (MEMS), with the advantages of high integration, high precision, low power consumption, and easy mass production, are widely used in intelligent manufacturing, robotics, and other elds [1][2][3][4]. MEMS include microsensors, microactuators, and processing circuits [5].…”
Section: Introductionmentioning
confidence: 99%