2018
DOI: 10.1016/j.tsf.2018.04.005
|View full text |Cite
|
Sign up to set email alerts
|

A bulge test based methodology for characterizing ultra-thin buckled membranes

Abstract: Buckled membranes become ever more important with further miniaturization and development of ultra-thin film based systems. It is well established that the bulge test method, generally considered the gold standard for characterizing freestanding thin films, is unsuited to characterize buckled membranes, because of compressive residual stresses and a negligible out-of-plane bending stiffness. When pressurized, buckled membranes immediately start entering the ripple regime, but they typically plastically deform … Show more

Help me understand this report
View preprint versions

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
7
0

Year Published

2020
2020
2024
2024

Publication Types

Select...
8

Relationship

1
7

Authors

Journals

citations
Cited by 13 publications
(7 citation statements)
references
References 28 publications
0
7
0
Order By: Relevance
“…( 2). For more details on the strain calculation procedure, the reader is referred to Shafqat et al (2018).…”
Section: Global Digital Height Correlation Analysismentioning
confidence: 99%
“…( 2). For more details on the strain calculation procedure, the reader is referred to Shafqat et al (2018).…”
Section: Global Digital Height Correlation Analysismentioning
confidence: 99%
“…Then, the governing differential equations Eqs. (15) for Φ X and U are a set of coupled, inhomogeneous, ordinary differential equations (ODEs) in X with constant coefficients. Based on the definition of λ from Eq.…”
Section: Solution Of the Deformation Equationsmentioning
confidence: 99%
“…Several techniques have been proposed to improve the accuracy of "traditional" bulge tests. These improvements include, but are not limited to, accounting for the film's bending stiffness [13], accounting for pre-stress in the film [2,14], considering the possibility of buckling [15] and better prediction of the stress distribution near edges [16] by using elastically clamped (instead of the traditional rigidly clamped) boundary conditions [10,11].…”
Section: Introductionmentioning
confidence: 99%
“…This is due to the limited dimensions of these structures, which prevent using standardized tests typically used for bulk specimens. 4,[9][10][11][12] Bulge test is widely used in industries such as microelectronics, where thin films are commonly used to manufacture electronic devices, nano-devices, coating applications, and biomedical devices, where the properties of soft tissues and biomaterials are of interest. 9,[13][14][15] Bulge test was also used to investigate the plastic behavior of metallic sheets to understand their formability or to obtain model parameters for predicting thermoforming behavior of plastic or metallic sheets.…”
Section: Introductionmentioning
confidence: 99%