A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating

Wang, Yun; Park, Seung Woo; Yeow, John T. W.; Langner, Andreas; Müller, Frank

doi:10.1016/j.snb.2010.06.010

Cited by 114 publications

(57 citation statements)

References 18 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Here we present a computer-aided design to predict the transient response and steady response of these capacitive sensors. We find that humidity sensors based on GO can overcome the existing problems reported in literature [23][24][25][26][27][28][29][30], and exhibit ultrahigh humidity sensitivity, as well as short response time. properties of the presented sensor are investigated over a wide range of 0-100% relative humidity at room temperature.…”

Section: Introductionmentioning

confidence: 67%

High sensitivity and fast response graphene oxide capacitive humidity sensor with computer-aided design

Guo

Tang

Shen

et al. 2016

Computational Materials Science

View full text Add to dashboard Cite

Section: Introductionmentioning

confidence: 67%

High sensitivity and fast response graphene oxide capacitive humidity sensor with computer-aided design

Guo

Tang

Shen

et al. 2016

Computational Materials Science

View full text Add to dashboard Cite

“…Much effort has been directed at improving the capacitive response by tuning the properties of the sensor surface coatings. An important route here is to increase the surface/air contact area in order to enhance the absorption of the water molecules [10][11][12][13]. For instance, Lee et al [10], increased the contact area by coating the sensor surface with polyimide nanograss structures, fabricated by plasma etching.…”

Section: Introductionmentioning

confidence: 99%

“…For instance, Lee et al [10], increased the contact area by coating the sensor surface with polyimide nanograss structures, fabricated by plasma etching. Wang et al [11] reported enhanced sensor performance, by using the ordered macroporous silicon array as a sensing layer. Moreover, they stated that, a 95 nm thin film coating of tantalum pentoxide (Ta 2 O 5 ) on the porous surface further enhanced the performance.…”

Section: Introductionmentioning

confidence: 99%

Capacitive humidity and dew-point sensing: Influence of wetting of surface-attached polymer monolayers on the sensor response

Schönberg

Kondrashov

Prokhorov

et al. 2016

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

“…Empirical solvent polarity/polarizability parameters have been also proposed to correlate the solute-solvent interactions with these parameters [11]. In numerous studies, the effect of ac frequency and the polarization of water on the sensitivity and response/recovery time of the humidity sensors have been discussed [16,17,23]. It is well known that the polymer-based humidity sensors have low sensitivity for low humidity levels due to the lower polarization of water at high ac frequencies compare to that of the lower ac frequencies or dc current.…”

Section: Introductionmentioning

confidence: 99%

A STUDY on the sensitivity and selectivity properties of Polymer based gas-vapor sensors

Cankurtaran

Yazıcı

Karaman³

2016

J. Turk. Chem. Soc., Sect. A: Chem.

View full text Add to dashboard Cite

Abstract:In this study, the water soluble poly (diphenylaminesulfonic acid) (PSDA) and the diblock copolymer of PSDA with poly(ethylene glycol) (PEG) were used to construct the interdigitated film electrodes (IDEs). Their responses against humidity and various solvent vapors were investigated by impedance measurements. Sorption and desorption behaviors of the solvents were determined by simultaneous registration of the impedance (Z) and the resistive (R, resistance) and capacitive (X, reactance) components of the Z under different potential bias and alternating current (ac) frequencies. The sensor responses were discussed considering the polar/non-polar and polarizability properties of the polymers and solvents. The effect of ac frequency and potential bias on the sensitivity and selectivity of the sensors were discussed. It was found that the solvent polarity is the primary effect on the electrical conductance and capacitance of both PSDA homopolymer and PSDA-b-PEG block copolymer. The results supported that the dipolarity-polarizability properties of solvents have also a critical role on sensor response at low ac frequencies. The more polarizable solvents gave higher sensor responses at lower ac frequencies. The equilibrium response of the PSDA based sensor was correlated with the dielectric constant of the solvents. The values of Z and R of PSDA film under saturated solvent vapors at 1 kHz ac frequency were linearly correlated (R 2 was 0.955, 0.993 and 0.957 for Z, R and X, respectively, in semi-logarithmic scale) with the values of the dielectric constants of the solvents, except water. A similar correlation (R 2 = 0.996) was obtained by using the R values of the PSDA film at 100 kHz ac frequency. In the case of PSDA-b-PEG polymer film, it was also possible to establish an almost linear correlation (R 2 =0.943) between the R at 100 kHz ac frequency and the values of the dielectric constants of the solvents, except acetone and water. Consequently, it was found that the applied ac frequency was distinctive on both the sensitivity and selectivity of the studied sensor.

show abstract

A capacitive humidity sensor based on ordered macroporous silicon with thin film surface coating

Cited by 114 publications

References 18 publications

High sensitivity and fast response graphene oxide capacitive humidity sensor with computer-aided design

High sensitivity and fast response graphene oxide capacitive humidity sensor with computer-aided design

Capacitive humidity and dew-point sensing: Influence of wetting of surface-attached polymer monolayers on the sensor response

A STUDY on the sensitivity and selectivity properties of Polymer based gas-vapor sensors

Contact Info

Product

Resources

About