A capacitive MEMS accelerometer readout with concurrent detection and feedback using discrete components

Terzioğlu, Yunus; Alper, Said Emre; Azgın, Kıvanç; Akın, Tayfun

doi:10.1109/plans.2014.6851351

Cited by 21 publications

(8 citation statements)

References 7 publications

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“…The echnique. In this the acceleration ing concurrent k. This circuit tion, eventually, ces [9]. In Fig.…”

Section: B Readout Circuit Designmentioning

confidence: 92%

“…In the proposed design, the die area is used effectively for maximum sensitivity by placing extra fingers inside the proof mass, leading to a compact design. In order to overcome the cross-axis sensitivity issues, a readout circuit is adapted from a singleaxis readout design, which is described in detail in [9]. With the help of this adapted analog readout circuit featuring force rebalancing, lower cross-axis sensitivity values, compared to the reported studies in the literature, are achieved.…”

Section: Introductionmentioning

confidence: 99%

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A single mass two-axis capacitive MEMS accelerometer with force rebalance

Kose

Terzioğlu

Azgın

et al. 2015

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings

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This paper presents a single mass 2-axis MEMS capacitive accelerometer with a unique force rebalance method achieved with the readout circuit developed for the simultaneous 2-axis acceleration sensing. Using a single mass structure with extra fingers for reading multiple axes allows better sensor performances when compared to multi-axis accelerometers with individual proof masses occupying the same die area. Test results show 274 mV/g scale factor for x-axis, and 280 mV/g scale factor for y-axis, while the cross-axis sensitivity for x-axis is calculated as 3.4 mV/g (% 1.26), and the cross-axis sensitivity for yaxis is-3.9 mV/g (% 1.4). Additionally, the bias instability values are measured as 22 µg and 23 µg, and the velocity random walk values are determined as 9.8µg/ √Hz and 9.9 µg/ √Hz for x and y axes, respectively. This sensing and readout approach can easily be adapted to achieve a high performance single mass 3-axis accelerometer in a small die area. Keywords-MEMS accelerometer, force rebalance I.978-1-4799-5915-0/15/$31.00 ©2015 IEEE

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“…The echnique. In this the acceleration ing concurrent k. This circuit tion, eventually, ces [9]. In Fig.…”

Section: B Readout Circuit Designmentioning

confidence: 92%

Section: Introductionmentioning

confidence: 99%

A single mass two-axis capacitive MEMS accelerometer with force rebalance

Kose

Terzioğlu

Azgın

et al. 2015

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings

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“…Bu yapı Kapalı Devre İvmeölçer Modeli olarak adlandırılır. Literatürdeki birçok örnekte olduğu gibi [1], [2], [3], kapalı devre bir ivmeölçer, temel olarak sismik kütlenin hareketini belli bir noktada sınırlar, ki bu genellikle referans pozisyonudur. Bu yapıda sismik kütlenin denge noktasında sabit tutulması için devreye uygulanan akımı ölçmek temel amaçtır.…”

Section: şEkil 1 Kuvars İvmeölçer Genel çAlışma Prensibiunclassified

“…Hem elektronik hem de mekanik bir çok bileşenden meydana gelmesi dolayısıyla performans açısından optimal tasarıma ulaşmak pek çok etkene bağlıdır. Optimal tasarım için oldukça farklı çalışmalar yapılmış [1], [2], [3] ve hali hazırda yapılmaktadır. Bu makalede de taktik seviye kullanımlar için kapasitif sensör okuma devresi tasarımı sunulmaktadır.…”

Section: Gi̇ri̇ş (Introduction)unclassified

Kuvars İvmeölçer Kapalı Döngü Analog Okuma Devresi

Günbaz

Aydemir

2020

Gazi Üniversitesi Fen Bilimleri Dergisi Part C: Tasarım Ve Teknoloji

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In this study, analog circuit design for the precision reading circuit of the tactical grade accelerometer is presented. Quartz accelerometer is modeled mathematically by dividing its structure into subunits. Optimal circuit structure has been reached within the scope of this model and this circuit has been transferred to a prototype which has been tested in the laboratory environment. The production and design objectives have been evaluated by comparing the measurements and simulation results.

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“…Terzioglu et al [3] the capacitive accelerometer has been designed using feedback system with the actuation method. A dynamic force across the patellofemoral joint is measured using a little implant.…”

Section: Introductionmentioning

confidence: 99%

An efficient and effective energy harvesting system using surface micromachined accelerometer

Gomathi

Shaby

2022

IJPEDS

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In many of the electronic devices the major role is performed by micro-electro-mechanical systems (MEMS). The electronics field has a vast application where in MEMS contribution to this field is very much greater. The electronics has a greater application in the area of micro-electro-mechanical systems which has greater applications in biomedical, electronics. The capacity, sensitivity in the power and its size helps MEMS for various different applications in different fields. If a device has a greater resonant frequency which can also be used in all frequencies that is at normal frequencies wider bandwidth, then also the MEMS fabrication can be done. A surface micromachined accelerometer is analyzed which can be used for generating energy from the environment. The characteristic feature is analyzed for the surface micromachined accelerometer. A surface micromachined accelerometer is simulate with a geometry of 3 space dimensions with a domain number of 120 whose number of boundaries are 838 which contains 1733 number of edges with 1076 vertices. The surface micromachined accelerator with all these specifications is simulate using COMSOL and the performance has been analyzed for various parameters namely frequency, acceleration and load impedance. The results show that energy has been harvested using the surface micromachined accelerometer.

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A capacitive MEMS accelerometer readout with concurrent detection and feedback using discrete components

Cited by 21 publications

References 7 publications

A single mass two-axis capacitive MEMS accelerometer with force rebalance

A single mass two-axis capacitive MEMS accelerometer with force rebalance

Kuvars İvmeölçer Kapalı Döngü Analog Okuma Devresi

An efficient and effective energy harvesting system using surface micromachined accelerometer

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