A Characteristic Study of Micromirror with Sidewall Electrodes

Bai, Yanhui; Yeow, John T. W.; Wilson, Brian C.

doi:10.1080/15599610701548852

Cited by 19 publications

(10 citation statements)

References 35 publications

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“…D is the damping coefficient of air and K is the torsional bar stiffness, which is assumed to be linear. The parameters of the biaxial micromirror can be seen in [23] . The torques T a,b are given by [22] T a ¼…”

Section: Control Designmentioning

confidence: 99%

Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system

Chen

Sun

et al. 2015

International Journal of Optomechatronics

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This article presents the development and implementation of a robust nonlinear control scheme for a 2-D micromirror-based laser scanning microscope system. The presented control scheme, built around sliding mode control approach and augmented an adaptive algorithm, is proposed to improve the tracking accuracy in presence of cross-axis effect. The closed-loop controlled imaging system is developed through integrating a 2-D micromirror with sidewall electrodes (SW), a laser source, NI field-programmable gate array (FPGA) hardware, the optics, position sensing detector (PSD) and photo detector (PD). The experimental results demonstrated that the proposed scheme is able to achieve accurate tracking of a reference triangular signal. Compared with open-loop control, the scanning performance is significantly improved, and a better 2-D image is obtained using the micromirror with the proposed scheme.

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Section: Control Designmentioning

confidence: 99%

Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system

Chen

Sun

et al. 2015

International Journal of Optomechatronics

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“…where the equivalent control term is designed as [15][16] asw est u J F t s i g n s (9) with the variable control gain F est .An adaptive algorithm is utilized to adjust the switching control gain properly which is defined as [17][18] The schematic of the proposed ISMC system is shown in figure 3, the torques are calculated by the proposed controller as the control variables. However, the torques depend on the drive voltages, which are the actual control inputs to the system.…”

Section: Control Designmentioning

confidence: 99%

“…1 J and 2 J are the moment of inertias of the mirror plate and gimbal respectively. D is the damping coefficient of air and K is the torsional bar stiffness, which is assumed to be linear.The torques , T D E are given by [15] 4 4 3 4…”

Section: Introductionmentioning

confidence: 99%

High performance closed-loop control of a 2D MEMS micromirror with sidewall electrodes for a laser scanning microscope system

Sun

Chen

et al. 2014

2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano)

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This paper presents the design and experimental implementation of an adaptive sliding mode control scheme for a 2D MEMS micromirror with sidewall electrodes(SW), a closedloop controlled 2D micromirror-based laser scanning microscope system is deveolped based on NI field-programmable gate array (FPGA) hardware, 2D image of the scanned target are obtained. Controller implementation, image acquisition and dispaly are performed with LABVIEW software through the FPGA card. Compared with open-loop control, the experimental results demonstrated that the proposed scheme is able to reduce the Yto-X cross-axis effect and achieve accurate tracking of a reference trianglur signal. The scanning performance is significantly improved, and better 2D image of traget is obtained using the micromirror with the propsoed scheme.

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“…A general dynamic equation (second-order differential equation) in terms of summation of torques has been used to describe the dynamic behavior of a MEMS mirror [22,23,24]. The parameters of the equation are dependent on the mechanical structure and the actuation mechanism of the device.…”

Section: Introductionmentioning

confidence: 99%

Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

et al. 2017

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Given the multiple applications for micro-electro-mechanical system (MEMS) mirror devices, most of the research efforts are focused on improving device performance in terms of tilting angles, speed, and their integration into larger arrays or systems. The modeling of these devices is crucial for enabling a platform, in particular, by allowing for the future control of such devices. In this paper, we present the modeling of a MEMS mirror structure with four actuators driven by the phase-change of a thin film. The complexity of the device structure and the nonlinear behavior of the actuation mechanism allow for a comprehensive study that encompasses simpler electrothermal designs, thus presenting a general approach that can be adapted to most MEMS mirror designs based on this operation principle. The MEMS mirrors presented in this work are actuated by Joule heating and tested using optical techniques. Mechanical and thermal models including both pitch and roll displacements are developed by combining theoretical analysis (using both numerical and analytical tools) with experimental data and subsequently verifying with quasi-static and dynamic experiments.

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A Characteristic Study of Micromirror with Sidewall Electrodes

Cited by 19 publications

References 35 publications

Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system

Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system

High performance closed-loop control of a 2D MEMS micromirror with sidewall electrodes for a laser scanning microscope system

Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

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