A Circular Bimorph Deformable Mirror for Circular/Annulus/Square Laser Beam Compensation

Lee, J.H.; Lee, Y.C.; Cheon, H.J.

doi:10.3807/josk.2006.10.1.023

Cited by 6 publications

(1 citation statement)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Thus, the measurement and the correction of a wavefront aberration of a laser pulse is important for improving the quality of the focal spot. An adaptive optics (AO) system [3] that consists of a wavefront sensing device [4,5] and a deformable mirror [6,7] measures and corrects a wavefront aberration of a laser pulse, and eventually delivers a nearly diffraction-limited focal spot to a target. However, in many cases, a nearly diffraction-limited focal spot becomes worse as time goes by.…”

Section: Introductionmentioning

confidence: 99%

Reconstruction of Wavefront Aberration of 100-TW Ti:sapphire Laser Pulse Using Phase Retrieval Method

Jeong¹,

Kim²,

Ko³

et al. 2008

Journal of the Optical Society of Korea

View full text Add to dashboard Cite

A phase retrieval method using an error reduction algorithm is developed for reconstructing a wavefront aberration of an 100-TW Ti:sapphire laser pulse from the measurement of a focal spot. The phase retrieval method can successfully reconstruct a wavefront aberration of a 100-TW Ti:sapphire laser pulse, and the reconstructed wavefront aberration shows a good agreement with the wavefront aberration measured with a wavefront sensor. The effect of the dynamic range and the intensity noise on the reconstruction is also investigated in reconstructing a wavefront aberration of an 100-TW Ti:sapphire laser pulse.

show abstract

Section: Introductionmentioning

confidence: 99%

Reconstruction of Wavefront Aberration of 100-TW Ti:sapphire Laser Pulse Using Phase Retrieval Method

Jeong¹,

Kim²,

Ko³

et al. 2008

Journal of the Optical Society of Korea

View full text Add to dashboard Cite

show abstract

Experimental and numerical investigations on cooling performance of chemical-vapor-deposited SiC deformable mirror for adaptive optics system in high-power laser radiation environments

Bae

Hur

Kim

et al. 2022

Applied Thermal Engineering

View full text Add to dashboard Cite

Motion-free TSOM using a deformable mirror

et al. 2020

View full text Add to dashboard Cite

Through-focus scanning optical microscopy (TSOM) is a model-based optical metrology method that involves the scanning of a target through the focus of an optical microscope. Unlike a conventional optical microscope that directly extracts the diffraction-limited optical information from a single in-focus image, the TSOM method extracts nanometer scale sensitive information by matching the target TSOM data/image to reference TSOM data/images that are either experimentally or computationally collected. Therefore, the sensitivity and accuracy of the TSOM method strongly depends on the similarities between the conditions in which the target and reference TSOM images are taken or simulated, especially the lateral instability during through-focus scanning. As a remedy to the lateral instability, we proposed the application of adaptive optics to the through-focus scanning operation and initially developed a closed-loop system with a tip/tilt mirror and a Shack-Hartmann sensor, with which we were able to keep the plane position within peak-to-valley (PV) 33 nm. We then further developed a motion-free TSOM tool reducing the instability down to practically zero by the replacement of the tip/tilt mirror with a deformable mirror that performs through-focus scanning by deforming its mirror surface. The motion-free TSOM tool with a × 50 (NA 0.55) objective lens could provide a scanning range of up to ± 25 µm with a minimum step of 25 nm at a maximum update rate of 4 kHz. The tool was demonstrated to have a recognition accuracy of < 4 nm for critical dimension (CD) values in the range of 60 ∼ 120 nm with a reference TSOM image library generated by a Fourier modal method matching various observations conditions.

show abstract

A Circular Bimorph Deformable Mirror for Circular/Annulus/Square Laser Beam Compensation

Cited by 6 publications

References 9 publications

Reconstruction of Wavefront Aberration of 100-TW Ti:sapphire Laser Pulse Using Phase Retrieval Method

Reconstruction of Wavefront Aberration of 100-TW Ti:sapphire Laser Pulse Using Phase Retrieval Method

Experimental and numerical investigations on cooling performance of chemical-vapor-deposited SiC deformable mirror for adaptive optics system in high-power laser radiation environments

Motion-free TSOM using a deformable mirror

Contact Info

Product

Resources

About