“…Most are fabricated from silicon using standard microlithographic techniques (silicon bulk micromachining and polysilicon surface micromachining) 144-461. With these methods, thousands of mechanical elements (for example, cantilevered beams, springs,linkages, mass elements and joints) can be batch-fabricated on a single silicon substrate [9,11]. Microactuators, micromotors and microengines [46] have been fabricated for optical switches, fluid pumps [a7], systems for drug delivery and microchemical analysis and high-speed rotational gyros for navigation [48][49][50][51].More recently, surface micromachining techniques have been used to fabricate miniaturized optical components [12][13][14].…”