A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks

Zhang, Lemin; Jiao, Binbin; Yun, Shichang; Kong, Yanmei; Ku, Chih-Wei; Chen, Dapeng

doi:10.1088/0256-307x/34/2/025101

Cited by 13 publications

(8 citation statements)

References 14 publications

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“…By measuring the voltage at both ends of the heater, with the applied current flowing through, resistance of the heater can be obtained. Meanwhile, based on the temperature coefficient of resistance (TCR) of the thermistor, its temperature and the air pressure can be obtained correspondingly [63][64][65]. The higher the TCR, the more sensitive the thermistor (also the heater) to the change of temperature, and thus the higher sensitivity of the Pirani sensor can be achieved.…”

Section: Thermistor-based Pirani Sensorsmentioning

confidence: 99%

Overview of the MEMS Pirani Sensors

Zhou

Shi

et al. 2022

Micromachines

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Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necessary in order to meet practical applications. Pirani sensors work by using the effect of air density on the heat conduction of the gas to cause temperature changes in sensitive structures, thus detecting the pressure in the surrounding environment and thus vacuum monitoring. In past decades, MEMS Pirani sensors have received considerable attention and practical applications because of their advances in simple structures, long service life, wide measurement range and high sensitivity. This review systematically summarizes and compares different types of MEMS Pirani sensors. The configuration, material, mechanism, and performance of different types of MEMS Pirani sensors are discussed, including the ones based on thermistors, thermocouples, diodes and surface acoustic wave. Further, the development status of novel Pirani sensors based on functional materials such as nanoporous materials, carbon nanotubes and graphene are investigated, and the possible future development directions for MEMS Pirani sensors are discussed. This review is with the purpose to focus on a generalized knowledge of MEMS Pirani sensors, thus inspiring the investigations on their practical applications.

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Section: Thermistor-based Pirani Sensorsmentioning

confidence: 99%

Overview of the MEMS Pirani Sensors

Zhou

Shi

et al. 2022

Micromachines

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“…[10] The passive technologies have become important methods in various fields, and relative researches have been carried out as can be found in Refs. [11][12][13] and others. Wang et al [14] used the main factors of temperature deviation to study the transport of steady-state heat flow.…”

Section: Introductionmentioning

confidence: 99%

Coupled flow and heat transfer of power-law nanofluids on non-isothermal rough rotary disk subjected to magnetic field

Pei¹,

Zhang²,

Zheng³

et al. 2022

Chinese Phys. B

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In this paper, we study coupled flow and heat transfer of power-law nanofluids on a non-isothermal rough rotating disk subject to a magnetic field. The problem is formulated in terms of specified curvilinear orthogonal coordinate system. An improved BVP4C algorithm is proposed and numerical solutions are obtained. The influence of volume fraction, types and shapes of nanoparticles, magnetic field and power-law index on the flow and heat transfer behavior are discussed.<br/>Results show that the power-law exponents (PLE), nanoparticle volume fraction (NVF) and magnetic field inclination angle (MFIA) are almost no effects on velocities in wave surface direction, but have small or significant effects on azimuth direction. NVF have remarkable influence on local Nusselt number (LNN) and friction coefficients (FC) in radial and azimuth directions (AD). LNN increases with NVF while FC in AD decrease. The types of nanoparticles, magnetic field strength and inclination have small effects on LNN, but they have remarkable effects on the friction coefficients with positively correlated while the inclination is negatively correlated with heat transfer rate. The size of the nanoparticle shape factor is positively correlated with LNN.

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“…In recent decades, scholars have committed to the development of high-performance micro-Pirani vacuum sensors that have a large dynamic vacuum pressure range, small size, and are complementary metal oxide semiconductor (CMOS) compatible. With the development of micromachining technology, various microelectromechanical systems (MEMS)-based micro-Pirani vacuum sensors with a complex structure and small size have been designed and fabricated [1,2,3]. These micro-Pirani vacuum sensors are particularly suitable to extremely miniaturized devices, and they offer the possibility of performing in situ vacuum pressure monitoring inside sealed MEMS packages of inertial sensors, such as gyroscopes, accelerometers, and inertial measurement units [4,5,6,7,8,9].…”

Section: Introductionmentioning

confidence: 99%

Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

Wei

Liu

et al. 2019

Sensors

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Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10−1 to 104 Pa when the forward bias current was as low as 10 μA with a power consumption of 50 μW. Average sensitivity was up to 90 μV/Pa and the sensitivity of unit power consumption increased to 1.8 V/W/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance.

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A CMOS Compatible MEMS Pirani Vacuum Gauge with Monocrystal Silicon Heaters and Heat Sinks

Cited by 13 publications

References 14 publications

Overview of the MEMS Pirani Sensors

Overview of the MEMS Pirani Sensors

Coupled flow and heat transfer of power-law nanofluids on non-isothermal rough rotary disk subjected to magnetic field

Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

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