A CMOS MEMS thermal sensor with high frequency output

Tseng, Sheng-Hsiang; Fang, Chiao-Li; Wu, Po-Chang; Juang, Ying‐Zong; Lu, Michael S.-C.

doi:10.1109/icsens.2008.4716460

Cited by 10 publications

(9 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Thermopiles are so applicable nowadays [15] and are reliable [16]. A thermopile which is applicable in a good range of temperature and with an approximately linear output in the desired range and mostly important the one which is implementable on silicon chip should be used [5]. Figure 2 shows how the thermoelectric voltage can be produced in different temperatures.…”

Section: Figure 1 Block Diagram Of a General Sensormentioning

confidence: 99%

A VCO in 65 nm technology for very accurate sensing applications

Andalibizadeh

Savadkouhi

Nasri

2010

2010 IEEE International Conference on Electro/Information Technology

View full text Add to dashboard Cite

in this paper a temperature sensor in 65 nm technology is presented. All blocks are implementable on chips as it was the goal from the beginning to have a "Sensor on a Chip" as outcome of the design. The general block diagram of the system shows that it can be used for any other purpose by changing the sensing part and making it a linear one. The sensor assumed to be usable for a control system and the output of a system is Frequency! It works at frequency range of 26 GHz to 31 GHz which represents a resolution of 50 MHz/ O C. The range for temperature is 100 O C to 190 O C. For sure this range can be improved by using other sorts of sensing parts than what is used for this research. The main part of the circuit is a VCO which consumes 17 mW at the highest frequency and a phase noise of -106.8 dBc/Hz at 1 MHz offset.

show abstract

Section: Figure 1 Block Diagram Of a General Sensormentioning

confidence: 99%

A VCO in 65 nm technology for very accurate sensing applications

Andalibizadeh

Savadkouhi

Nasri

2010

2010 IEEE International Conference on Electro/Information Technology

View full text Add to dashboard Cite

show abstract

“…Significant efforts have been reported in the literature to develop frequency based measurement methods for resistive sensing [19], [22]. The nonlinear relationship between the input voltage and the output frequency is a common issue with these works.…”

Section: A Frequency-based Measurementmentioning

confidence: 99%

“…The nonlinear relationship between the input voltage and the output frequency is a common issue with these works. An electrothermal sensor measurement with a high frequency output is reported in [22]. Also an oscillator based signal conditioning is introduced in [19].…”

Section: A Frequency-based Measurementmentioning

confidence: 99%

Frequency Modulation Technique for MEMS Resistive Sensing

2012

View full text Add to dashboard Cite

Abstract-Frequency modulation technique can be applied to microelectromechanical systems (MEMS) transducers that require some form of resistive sensing. For example, electrothermal sensing is being investigated as a viable means of measuring displacement in micromachined transducers. This paper proposes a highly sensitive readout circuit, which can convert 10 change of resistance in a 400 electrothermal sensor to more than 200 kHz frequency variation (350-550 KHz). The frequency variations are then converted to voltage values by means of a frequency demodulation. In addition, the proposed technique achieves high linearity from the voltage applied to the actuator to the voltage measured at the sensor's output, which can potentially eliminate the need for an additional linearization if the sensor is used in a feedback loop. The proposed approach leads to high sensitivity in the MEMS electrothermal sensing since the method is not affected by amplitude variations that could arise from the readout circuit.

show abstract

“…Our research suggests that it will be more practical in thermal IR sensor applications and compatible with standard CMOS processes and more simplified signal processing. Due to the maturity of the processes and being compatible with standard CMOS technology, we devoted the promotion of IR elements to using CMOS-MEMS techniques which have proven particularly effective in the development of system on a chip (SOC) technology [ 32 , 33 , 34 ]. In summary, we give a new approach to improve the sensitivity of a CMOS-MEMS IR sensor with drop-coated rGO to achieve high thermal radiation absorption.…”

Section: Introductionmentioning

confidence: 99%

Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide

Chen

2020

Sensors

View full text Add to dashboard Cite

In this research, a new application of reduced graphene oxide (rGO) for a complementary metal-oxide-semiconductor (CMOS)-MEMS infrared (IR) sensor and emitter is proposed. Thorough investigations of IR properties including absorption and emission were proceeded with careful calibration and measurement with a CMOS thermoelectric sensor. The thermocouples of the sensor consist of aluminum and n-polysilicon layers which are fabricated with the TSMC 0.35 μm CMOS process and MEMS post-process. In order to improve the adhesion of rGO, a sensing area at the center of the membrane is formed with an array of holes, which is easy for the drop-coating of rGO material upon the sensing region. To evaluate the performance of the IR sensor with rGO, different conditions of the IR thermal radiation experiments were arranged. The results show that the responsivity of our proposed CMOS-MEMS IR sensor with rGO increases by about 77% compared with the sensor without rGO. For different IR absorption incident angles, the measurement of field of view shows that the CMOS-MEMS IR sensor with rGO has a smaller view angle, which can be applied for the application of long-distance measuring. In addition, characteristics of the proposed thermopile are estimated and analyzed with comparisons to the available commercial sensors by the experiments.

show abstract

A CMOS MEMS thermal sensor with high frequency output

Cited by 10 publications

References 9 publications

A VCO in 65 nm technology for very accurate sensing applications

A VCO in 65 nm technology for very accurate sensing applications

Frequency Modulation Technique for MEMS Resistive Sensing

Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide

Contact Info

Product

Resources

About